Influence of the cure process on the properties of hydrogen silsesquioxane spin-on-glass

Materials Research Society Symposium - Proceedings

Volumn 443, Issue , 1997, Pages 195-200

  Tobben, D ^a   Weigand, P ^a   Shapiro, M J ^a   Cohen, S A ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; DENSIFICATION; DIELECTRIC FILMS; HIGH TEMPERATURE EFFECTS; METALLIZING; PERMITTIVITY; POROUS MATERIALS;

HYDROGEN SILSESQUIOXANE SPIN ON GLASS; MICROPOROUS STRUCTURES; MULTILEVEL METALLIZATION;

SEMICONDUCTING GLASS;

EID: 0030686313     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)