Properties of new low dielectric constant spin-on silicon oxide based polymers

Materials Research Society Symposium - Proceedings

Volumn 476, Issue , 1997, Pages 25-30

  Hacker, Nigel P ^a   Davis, Gary ^a   Figge, Lisa ^a   Krajewski, Todd ^a   Lefferts, Scott ^a   Nedbal, Jan ^a   Spear, Richard ^a  

^a AlliedSignal   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; MOLECULAR STRUCTURE; PERMITTIVITY; PYROLYSIS; REFRACTIVE INDEX; SILICA; STRESS ANALYSIS; THERMAL STRESS; THERMODYNAMIC STABILITY;

METHYLSILSESQUIOXANE; SILANOL;

INORGANIC POLYMERS;

EID: 0031335005     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-476-25     Document Type: Conference Paper

References (2)