Effect of deposition conditions on the properties of vapor-deposited parylene AF-4 films

Materials Research Society Symposium - Proceedings

Volumn 476, Issue , 1997, Pages 213-218

  Plano, M A ^a   Kumar, D ^a   Cleary, T J ^a  

^a NOVELLUS SYSTEMS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AROMATIC POLYMERS; CHEMICAL BONDS; DIELECTRIC FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; PYROLYSIS; REFRACTIVE INDEX; SILICON WAFERS; SURFACE ROUGHNESS; THERMAL CYCLING; THERMAL EFFECTS; VAPOR DEPOSITION;

DIMERS; PARYLENE;

PLASTIC FILMS;

EID: 0031374694     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-476-213     Document Type: Conference Paper

References (4)