Low dielectric constant materials for IC intermetal dielectric applications: A status report on the leading candidates

Materials Research Society Symposium - Proceedings

Volumn 443, Issue , 1997, Pages 3-14

  Hendricks, Neil H ^a  

^a Allied Signal   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES OF SOLIDS; INTEGRATED CIRCUITS; ORGANIC POLYMERS; PERMITTIVITY; PLASTIC FILMS; POROUS MATERIALS; SILICONES; THIN FILMS;

INTERMETAL DIELECTRICS;

DIELECTRIC FILMS;

EID: 0030649328     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (35)