SIMS of organics - Advances in 2D and 3D imaging and future outlook

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 5, 2013, Pages

  Gilmore, Ian S ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

2D AND 3D IMAGING; CLUSTER ION SOURCES; ELECTRONIC DEVICE; FUNDAMENTAL PRINCIPLES; LATEST DEVELOPMENT; SPATIAL RESOLUTION; THREE DIMENSIONAL IMAGES; THREE ORDERS OF MAGNITUDE;

ION SOURCES;

SECONDARY ION MASS SPECTROMETRY;

EID: 84885116423     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4816935     Document Type: Review

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