Static SIMS-VAMAS interlaboratory study for intensity repeatability, mass scale accuracy and relative quantification

Surface and Interface Analysis

Volumn 42, Issue 3, 2010, Pages 129-138

  Green, F M ^a   Gilmore, I S ^a   Lee, J L S ^a   Spencer, S J ^a   Seah, M P ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Constancy; Mass cale calibration; Relative quantification; Repeatability; Standardisation; Static SIMS; TOF SIMS

Indexed keywords

CURRENT CAPABILITY; FOUR QUADRANT; INTERLABORATORY STUDIES; IRGANOX 1010; ISO STANDARDS; MASS CALIBRATIONS; MASS SCALE; OPTIMISATIONS; REFERENCE MATERIAL; RELATIVE INTENSITY; RELATIVE QUANTIFICATION; SECONDARY ION MASS SPECTROMETERS; STANDARD DEVIATION; STANDARDISATION; STATIC SIMS; THIN LAYERS; TIME OF FLIGHT; TOF SIMS;

CALIBRATION; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; STATISTICS; TROPICAL ENGINEERING;

SECONDARY ION MASS SPECTROMETRY;

EID: 77449159988     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3181     Document Type: Article

References (23)

1. I. S. Gilmore, M. P. Seah, Surf. Interface Anal. 2000, 29, 624.
2. I. S. Gilmore, M. P. Seah, F. M. Green, Surf. Interface Anal. 2005, 37, 651.
3. I. S. Gilmore, F. M. Green, M. P. Seah, Surf. Interface Anal. 2007, 39, 817.
4. ISO 23830. Surface chemical analysis - secondary ion mass spectrometry - repeatability and constancy of the relative intensity scale in static secondary ion mass spectrometry, 2008.
5. F. M. Green, I. S. Gilmore, M. P. Seah, J.Am.Soc.MassSpectrom.2006, 17, 514.
6. J. L. S. Lee, I. S.Gilmore,M. P. Seah,A. G. Shard, NPL Report 2009, AS31.
7. A. G. Shard, L. Yang, S. Ray, NPL Report 2009, AS32.
8. F. M. Green, J. L. S. Lee, I. S. Gilmore, M. P. Seah, NPL Report 2009, AS029.
9. I. S. Gilmore, M. P. Seah, Appl. Surf. Sci. 2002, 187, 89.
10. I. S. Gilmore, M. P. Seah, Int. J. Mass Spectrom. 2000, 202, 217.
11. C. Poleunis, N. Médard, P. Bertrand, Appl. Surf. Sci. 2004, 231-232, 269.
12. I. S. Gilmore, M. P. Seah, J. E. Johnstone, Surf. Interface Anal. 2003, 35, 888.
13. A. G. Shard, F. M. Green, P. J. Brewer, M. P. Seah, I. S. Gilmore, J. Phys. Chem. B 2008, 112, 2596.
14. F.M.Green, A. G. Shard, I. S. Gilmore,M. P. Seah, Anal. Chem. 2009, 81, 75.
15. M. P. Seah, S. J. Spencer, Surf. Interface Anal. 2002, 33, 640.
16. M. P. Seah, S. J. Spencer, Surf. Interface Anal. 2005, 37, 731.
17. F. M. Green,M. P. Seah, I. S. Gilmore, (in press).
18. M. P. Seah, J. Electron Spectrosc. 1995, 71, 191.
19. D. A. Shirley, Phys. Rev. B 1972, 5, 4709.
20. J. L. S. Lee, I. S. Gilmore, in SurfaceAnalysis - ThePrincipal Techniques (2nd edn), (Eds: J. C. Vickerman, I. S. Gilmore), John Wiley & Sons: Chichester, 2009, pp 563.
21. J. L. S. Lee, I. S. Gilmore, A Guide to the Practical Use of Chemometrics - withApplications for Static SIMS, NPLWebsite, 2008, http://www.npl.co.uk/ nanoanalysis/chemometrics.html.
22. F. M. Green, Repeatibility and constancy of the relative intensity scale, NPL website, 2006, http://resource.npl.co.uk/docs/sciencetechnology/ nanotechnology/ssims/repeatabilityandconstancyspreadsheet.xls.
23. A. G. Shard, P. J. Brewer,F. M. Green, I. S. Gilmore, Surf. InterfaceAnal. 2007, 39, 294.