Topographic correction of 3D SIMS images

Surface and Interface Analysis

Volumn 25, Issue 10, 1997, Pages 788-789

  Wagter, M L ^a   Clarke, A H ^a   Taylor, K F ^a   Van Der Heide, P A W ^a   McIntyre, N S ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

AFM; Imaging; SIMS; Topography

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BOMBARDMENT; SURFACE STRUCTURE; THREE DIMENSIONAL;

DEPTH PROFILING; SURFACE TOPOGRAPHY;

SECONDARY ION MASS SPECTROMETRY;

EID: 0031237349     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199709)25:10<788::AID-SIA300>3.0.CO;2-W     Document Type: Article

References (7)

1. F. G. Rudenhauer, Anal. Chim. Acta 297, 197 (1994).
2. E. H. Cirlin and J. J. Vago, in SIMS VIII: Proceedings of the International Conference on Secondary Ion Mass Spectrometry, Amsterdam, 1991, ed. by A. Benninghoven, K. Janssen, J. Tumpner and H. W. Werner pp. 347-350. Wiley, Chichester (1992).
3. M. Hatada, A. Karen, Y. Nakagawa, M. Saeda, M. Uchida, K. Okuno, F. Soeda and A. Ishitani, in SIMS VIII: Proceedings of the International Conference on Secondary Ion Mass Spectrometry, Amsterdam, 1991, ed. by A. Benninghoven, K. Janssen, J. Tumpner and H. W. Werner, pp. 351-354. Wiley, Chichester (1992).
4. S. F. Lu, G. R. Mount, N. S. McIntyre and A. Fenster, Surf. Interface Anal. 21, 177 (1994).
5. N. S. McIntyre, K. F. Taylor, G. R. Mount and C. G. Weisener, in SIMS VIII: Proceedings of the International Conference on Secondary Ion Mass Spectrometry, Amsterdam, 1991, ed. by A. Benninghoven, K. Janssen, J. Tumpner and H. W. Werner, pp. 513-516. Wiley, Chichester (1992).
6. N. S. McIntyre, R. D. Davidson, K. F. Taylor, C. G. Weisener, F. C. Gonzalez, E. M. Rasile and A. M. Brennenstühl, Surf. Interface Anal. 18, 601 (1992).
7. N. S. McIntyre, P. A. W. van der Heide, D. M. Kingston, G. R. Mount, A. H. Clarke, K. F. Taylor and B. D. Warr, Proceedings of the European Conference on Applied Surface and Interfacial Analysis (ECASIA), Montreux, 1995, ed. by H. J. Mathieu, pp. 151-155. Wiley, Chichester (1996).