Argon cluster ion beams for organic depth profiling: Results from a VAMAS interlaboratory study

Analytical Chemistry

Volumn 84, Issue 18, 2012, Pages 7865-7873

  Shard, Alexander G ^a   Havelund, Rasmus ^a   Seah, Martin P ^a   Spencer, Steve J ^a   Gilmore, Ian S ^a   Winograd, Nicholas ^b   Mao, Dan ^b   Miyayama, Takuya ^c   Niehuis, Ewald ^d   Rading, Derk ^d   Moellers, Rudolf ^d  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c ULVAC PHI Inc   (Japan)

^d UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED MATERIALS; ANALYTICAL INSTRUMENTATION; ARGON CLUSTERS; CHARGE COMPENSATION; DEPTH PROFILE; DEPTH RESOLUTION; INITIAL STAGES; INTERLABORATORY STUDIES; IRGANOX 1010; IRGANOX 3114; MOLECULAR DAMAGE; ORGANIC DEPTH PROFILING; ORGANIC MATERIALS; ORGANIC MULTILAYERS; REFERENCE MATERIAL; SECONDARY IONS; SPUTTERING YIELDS; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY;

SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; SURFACE ANALYSIS;

MATERIALS;

EID: 84866390166     PISSN: 00032700     EISSN: 15206882     Source Type: Journal    
DOI: 10.1021/ac301567t     Document Type: Article

References (42)

1. Gillen, G.; Roberson, S. Rapid Commun. Mass Spectrom. 1998, 12, 1303-1312
2. Mahoney, C. M.; Fahey, A. J. Anal. Chem. 2008, 80, 624-632
3. Fletcher, J. S.; Conlan, X. A.; Lockyer, N. P.; Vickerman, J. C. Appl. Surf. Sci. 2006, 252, 6513-6516
4. Mahoney, C. M.; Patwardhan, D. V.; McDermott, M. K. Appl. Surf. Sci. 2006, 252, 6554-6557
5. Mahoney, C. M.; Roberson, S.; Gillen, G. Appl. Surf. Sci. 2004, 231, 174-178
6. Mahoney, C. M.; Roberson, S. V.; Gillen, G. Anal. Chem. 2004, 76, 3199-3207
7. Mahoney, C. M.; Yu, J. X.; Fahey, A.; Gardella, J. A. Appl. Surf. Sci. 2006, 252, 6609-6614
8. Breitenstein, D.; Rommel, C. E.; Moellers, R.; Wegener, J.; Hagenhoff, B. Angew. Chem., Int. Ed. 2007, 46, 5332-5335
9. Breitenstein, D.; Rommel, C. E.; Stolwijk, J.; Wegener, J.; Hagenhoff, B. Appl. Surf. Sci. 2008, 255, 1249-1256
10. Fletcher, J. S.; Rabbani, S.; Henderson, A.; Lockyer, N. P.; Vickerman, J. C. Rapid Commun. Mass Spectrom. 2011, 25, 925-932
11. Ninomiya, S.; Ichiki, K.; Yamada, H.; Nakata, Y.; Seki, T.; Aoki, T.; Matsuo, J. Rapid Commun. Mass Spectrom. 2009, 23, 3264-3268
12. Cheng, J.; Wucher, A.; Winograd, N. J. Phys. Chem. B 2006, 110, 8329-8336
13. Shard, A. G.; Brewer, P. J.; Green, F. M.; Gilmore, I. S. Surf. Interface Anal. 2007, 39, 294-298
14. Sostarecz, A. G.; McQuaw, C. M.; Wucher, A.; Winograd, N. Anal. Chem. 2004, 76, 6651-6658
15. Krantzman, K. D.; Wucher, A. J. Phys. Chem. C 2010, 114, 5480-5490
16. Delcorte, A.; Garrison, B. J. J. Phys. Chem. C 2007, 111, 15312-15324
17. Mollers, R.; Tuccitto, N.; Torrisi, V.; Niehuis, E.; Licciardello, A. Appl. Surf. Sci. 2006, 252, 6509-6512
18. Mahoney, C. M.; Fahey, A. J.; Gillen, G.; Xu, C.; Batteas, J. D. Appl. Surf. Sci. 2006, 252, 6502-6505
19. Mahoney, C. M.; Fahey, A. J.; Gillen, G.; Xu, C.; Batteas, J. D. Anal. Chem. 2007, 79, 837-845
20. Sjovall, P.; Rading, D.; Ray, S.; Yang, L.; Shard, A. G. J. Phys. Chem. B 2010, 114, 769-774
21. Miyayama, T.; Sanada, N.; Iida, S. I.; Hammond, J. S.; Suzuki, M. Appl. Surf. Sci. 2008, 255, 951-953
22. Muramoto, S.; Brison, J.; Castner, D. G. Anal. Chem. 2012, 84, 365-372
23. Wagner, M. S. Anal. Chem. 2005, 77, 911-922
24. Lu, C. Y.; Wucher, A.; Winograd, N. Anal. Chem. 2011, 83, 351-358
25. Shard, A. G.; Green, F. M.; Brewer, P. J.; Seah, M. P.; Gilmore, I. S. J. Phys. Chem. B 2008, 112, 2596-2605
26. Paruch, R. J.; Postawa, Z.; Wucher, A.; Garrison, B. J. J. Phys. Chem. C 2012, 116, 1042-1051
27. Shard, A. G.; Foster, R.; Gilmore, I. S.; Lee, J. L. S.; Ray, S.; Yang, L. Surf. Interface Anal. 2011, 43, 510-513
28. Shard, A. G.; Ray, S.; Seah, M. P.; Yang, L. Surf. Interface Anal. 2011, 43, 1240-1250
29. Zalar, A. Thin Solid Films 1985, 124, 223-230
30. Iida, S.; Miyayama, T.; Sanada, N.; Suzuki, M.; Fisher, G. L.; Bryan, S. R. e-J. Surf. Sci. Nanotechnol. 2009, 7, 878-881
31. Kozole, J.; Willingham, D.; Winograd, N. Appl. Surf. Sci. 2008, 255, 1068-1070
32. Gillen, G.; Fahey, A.; Wagner, M.; Mahoney, C. Appl. Surf. Sci. 2006, 252, 6537-6541
33. Mao, D.; Wucher, A.; Winograd, N. Anal. Chem. 2010, 82, 57-60
34. Ninomiya, S.; Ichiki, K.; Yamada, H.; Nakata, Y.; Seki, T.; Aoki, T.; Matsuo, J. Rapid Commun. Mass Spectrom. 2009, 23, 1601-1606
35. Lee, J. L. S.; Ninomiya, S.; Matsuo, J.; Gilmore, I. S.; Seah, M. P.; Shard, A. G. Anal. Chem. 2010, 82, 98-105
36. Dowsett, M. G.; Rowlands, G.; Allen, P. N.; Barlow, R. D. Surf. Interface Anal. 1994, 21, 310-315
37. Brison, J.; Muramoto, S.; Castner, D. G. J. Phys. Chem. C 2010, 114, 5565-5573
38. Shard, A. G.; Seah, M. P. Surf. Interface Anal. 2011, 43, 1430-1435
39. Rabbani, S.; Barber, A. M.; Fletcher, J. S.; Lockyer, N. P.; Vickerman, J. C. Anal. Chem. 2011, 83, 3793-3800
40. Seki, T.; Murase, T.; Matsuo, J. Nucl. Instrum. Methods Phys. Res. Sect. B 2006, 242, 179-181
41. Gilmore, I. S.; Seah, M. P. Appl. Surf. Sci. 2003, 203, 600-604
42. Zheng, L. L.; Wucher, A.; Winograd, N. Anal. Chem. 2008, 80, 7363-7371