Analysis of cluster ion sputtering yields: Correlation with the thermal spike model and implications for static secondary ion mass spectrometry

Surface and Interface Analysis

Volumn 39, Issue 7, 2007, Pages 634-643

  Seah, M P ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Cluster sputtering; Ion yields; Sputtering yields; Static SIMS; Thermal spike

Indexed keywords

CORRELATION METHODS; MOLECULAR DYNAMICS; SECONDARY ION MASS SPECTROMETRY; SUBSTRATES;

CLUSTER SPUTTERING; ION YIELDS; SPUTTERING YIELDS; STATIC SIMS; THERMAL SPIKE MODELS;

REACTIVE SPUTTERING;

EID: 34250768963     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2572     Document Type: Article

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