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Rapid Communications in Mass Spectrometry

Volumn 23, Issue 5, 2009, Pages 599-602

G-SIMS: Relative effectiveness of different monatomic primary ion source combinations

(3) Seah, Martin P a Gilmore, Ian S a Green, Felicia M a

a NATIONAL PHYSICAL LABORATORY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CS +; ENERGY; ION FRAGMENTS; PLASMA TEMPERATURE; PRIMARY IONS; RELATIVE INTENSITY; SECONDARY IONS; SPECTRA'S; SPUTTERING YIELDS; SURFACE PLASMA;

ION SOURCES;

EID: 62549162218 PISSN: 09514198 EISSN: 10970231 Source Type: Journal
DOI: 10.1002/rcm.3911 Document Type: Article

Times cited : (6)

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