Sputtering yields for gold using argon gas cluster ion beams

Journal of Physical Chemistry C

Volumn 116, Issue 44, 2012, Pages 23735-23741

  Yang, Li ^a   Seah, Martin P ^a   Gilmore, Ian S ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON GAS; BEAM ENERGIES; GAS CLUSTER ION BEAMS; GOLD LAYER; INTENSITY ENHANCEMENT; N VALUE; PRIMARY IONS; SECONDARY IONS; SI WAFER; SPUTTERING YIELDS; THERMAL OXIDES; THERMAL SPIKE MODEL; TOTAL YIELD;

ARGON; ATOMS; GOLD;

SILICON WAFERS;

EID: 84868700039     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp307203f     Document Type: Article

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