Ultra high spatial resolution SIMS with cluster ions - Approaching the physical limits

Surface and Interface Analysis

Volumn 45, Issue 1, 2013, Pages 312-314

  Kollmer, Felix ^a   Paul, Wolfgang ^a   Krehl, Martin ^a   Niehuis, Ewald ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

cluster FIB; cluster SIMS; high lateral resolution; imaging SIMS

Indexed keywords

BI CLUSTERS; BURIED OBJECTS; CLUSTER FIB; CLUSTER IONS; CLUSTER SIMS; COVERING MATERIAL; CRATER WALL; HIGH-LATERAL RESOLUTION; ION CLUSTER; LATERAL RESOLUTION; LINE STRUCTURES; PHYSICAL LIMITS; PRIMARY BEAMS; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY; TOF SIMS; ULTRA-HIGH;

BISMUTH;

SECONDARY ION MASS SPECTROMETRY;

EID: 84872868756     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.5093     Document Type: Conference Paper

References (5)

1. M. Benguerba, et al,., Nucl. Instr. Meth. 1991, B62, 8-22.
2. F. Kollmer, Appl. Surf. Sci. 2004, 231-232, 153-158.
3. F. Koetter, A. Benninghoven, Appl. Surf. Sci. 1998, 113, 47.
4. L. Bischoff, et al,., Nucl. Inst. Meth. Phys. Res. B 2000, 161-163, 1128-1131.
5. M. Senoner, W. E. S. Unger, Surf. Interface Anal. 2007, 39, 16-25.