Measurement of sputtering yields and damage in C60 SIMS depth profiling of model organic materials

Surface and Interface Analysis

Volumn 39, Issue 4, 2007, Pages 294-298

  Shard, A G ^a   Brewer, P J ^a   Green, F M ^a   Gilmore, I S ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

C60; Organic depth profiling; SIMS

Indexed keywords

CARBON; DEPTH PROFILING; MULTILAYER FILMS; ORGANIC POLYMERS; POSITIVE IONS; SPUTTERING;

ORGANIC DEPTH PROFILING; ORGANIC THIN FILMS; POLYLACTIDE;

THIN FILMS;

EID: 34147205562     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2525     Document Type: Article

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