Atomic layer deposition: State-of-the-art and research/industrial perspectives

Corrosion Reviews

Volumn 29, Issue 5-6, 2011, Pages 191-208

  Marin, Elia ^a   Lanzutti, Alex ^a   Andreatta, Francesco ^a   Lekka, Maria ^a   Guzman, Luis ^a  

^a UNIVERSITY OF UDINE   (Italy)

Author keywords

Atomic layer deposition; Corrosion protection; Electrochemical characterization; Surface analysis

Indexed keywords

ANALYSIS AND CHARACTERIZATION; CHEMICAL BARRIERS; CONFORMAL COATINGS; DEPOSITION TECHNOLOGY; ELECTROCHEMICAL CHARACTERIZATIONS; ELECTRONIC COMPONENT; METALLIC ALLOYS; MOLECULAR LAYER; MOLECULAR RESOLUTION; NANOMETRICS; SUBSTRATE SURFACE; THICKNESS TOLERANCE;

CORROSION PROTECTION; LUNAR SURFACE ANALYSIS; SURFACE ANALYSIS;

ATOMIC LAYER DEPOSITION;

EID: 84860175719     PISSN: 03346005     EISSN: None     Source Type: Journal    
DOI: 10.1515/CORRREV.2011.010     Document Type: Review

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