Simulation of growth dynamics in atomic layer deposition. Part II. Polycrystalline films from cubic crystallites

Thin Solid Films

Volumn 515, Issue 11, 2007, Pages 4538-4549

  Nilsen, Ola ^a   Karlsen, Ole Bjørn ^a   Kjekshus, Arne ^a   Fjellvåg, Helmer ^a  

^a UNIVERSITY OF OSLO   (Norway)

Author keywords

Atomic layer epitaxy; Chemical vapor deposition; Growth dynamics; Simulation

Indexed keywords

COMPUTER SIMULATION; CRYSTAL STRUCTURE; FILM GROWTH; POLYCRYSTALLINE MATERIALS; SURFACE ROUGHNESS; TOPOLOGY;

ATOMIC LAYER DEPOSITION (ALD) TECHNIQUE; ATOMIC LAYER EPITAXY; GROWTH DYNAMICS; POLYCRYSTALLINE FILMS;

THIN FILMS;

EID: 33847161291     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.024     Document Type: Article

References (45)

1. Ritala M., and Leskelä A. In: Nalwa H.S. (Ed). Handbook of Thin Film Materials vol. 1 (2001), Academic Press, San Diego, CA 103
2. Puurunen R.L. J. Appl. Phys. 97 (2005) 121301
3. Nilsen O., Karlsen O.B., Kjekshus A., and Fjellvåg H. Thin Solid Films 515 (2007) 4531 10.1016/j.tsf.2006.11.023 (this issue)
4. Frank M.M., Chabal Y.J., Green M.L., Delabie A., Brijs B., Wilk G.D., Ho M.-Y., da Rosa E.B.O., Baumvol I.J.R., and Stedile F.C. Appl. Phys. Lett. 83 (2003) 740
5. Grubbs R.K., Nelson C.E., Steinmetz N.J., and George S.M. Thin Solid Films 467 (2004) 16
6. Beyer G., Satta A., Schumacher J., Maex K., Besling W., Kilpela O., Sprey H., and Tempel G. Microelectron. Eng. 64 (2002) 233
7. Nohira H., Tsai W., Besling W., Young E., Petry J., Conard T., Vandervorst W., De Gendt S., Heyns M., Maes J., and Tuominen M. J. Non-Cryst. Solids 303 (2002) 83
8. Besling W.F.A., Young E., Conard T., Zhao C., Carter R., Vandervorst W., Caymax M., De Gendt S., Heyns M., Maes J., Tuominen M., and Haukka S. J. Non-Cryst. Solids 303 (2002) 123
9. Elam J.W., Nelson C.E., Grubbs R.K., and George S.M. Thin Solid Films 386 (2001) 41
10. Satta A., Schuhmacher J., Whelan C.M., Vandervorst W., Brongersma S.H., Beyer G.P., Maex K., Vantomme A., Viitanen M.M., Brongersma H.H., and Besling W.F.A. J. Appl. Phys. 92 (2002) 7641
11. Green M.L., Ho M.-Y., Busch B., Wilk G.D., Sorsch T., Conard T., Brijs B., Vandervorst W., Räisänen P.I., Muller D., Brude M., and Grazul J. J. Appl. Phys. 92 (2002) 7168
12. Puurunen R.L., Vandervorst W., Besling W.F.A., Richard O., Bender H., Conard T., Zhao C., Delabie A., Caymax M., De Gendt S., Heyns M., Viitanen M.M., De Ridder M., Brongersma H.H., Tamminga Y., Dao T., De Win T., Verheijen M., Kaiser M., and Tuominen M. J. Appl. Phys. 96 (2004) 4878
13. Hoyas A.M., Schumacher J., Shamiryan D., Waeterloos J., Besling W., Celis J.P., and Maex K. J. Appl. Phys. 95 (2004) 381
14. Kukli K., Aarik J., Uustare T., Lu J., Ritala M., Aidla A., Pung L., Hårstad A., Leskelä M., Kikas A., and Sammelselg V. Thin Solid Films 479 (2005) 1
15. Nilsen O., Fjellvåg H., and Kjekshus A. Thin Solid Films 450 (2004) 240
16. Kukli K., Ritala M., Sajavaara T., Keininen J., and Leskelä M. Thin Solid Films 416 (2002) 72
17. Elam J.W., Sechrist Z.A., and George S.M. Thin Solid Films 414 (2002) 43
18. Nilsen O., Fjellvåg H., and Kjekshus A. Thin Solid Films 444 (2003) 44
19. Nilsen O., Foss S., Fjellvåg H., and Kjekshus A. Thin Solid Films 468 (2004) 65
20. Päiväsaari J., Putkonen M., Sajavaara T., and Niinistö L. J. Alloys Compd. 374 (2004) 124
21. Aarik J., Aidla A., Mändar H., Sammelselg V., and Uustare T. J. Cryst. Growth 220 (2000) 105
22. Hausmann D.M., and Gordon R.G. J. Cryst. Growth 249 (2003) 251
23. Guziewicz E., Godlewski M., Kopalko K., Lusakowska E., Dynowska E., Guziewicz M., Godlewski M.M., and Phillips M. Thin Solid Films 446 (2004) 172
24. Ihanus J., Ritala M., Leskelä M., Prohaska T., Resch R., Friedbacher G., and Grasserbauer M. Appl. Surf. Sci. 120 (1997) 43
25. Cassir M., Goubin F., Bernay C., Vernoux P., and Lincot D. Appl. Surf. Sci. 193 (2002) 120
26. Putkonen M., Johansson L.-S., Rauhala R., and Niinistö L. J. Mater. Chem. 9 (1999) 2449
27. Dey S., and Yun S.J. Appl. Surf. Sci. 143 (1999) 191
28. Putkonen M., Sajavaara T., and Niinistö L. J. Mater. Chem. 10 (2000) 1857
29. Park H.-S., Min J.-S., Lim J.-W., and Kang S.-W. Appl. Surf. Sci. 158 (2000) 81
30. Lim J.-W., Park H.-S., and Kang S.-W. J. Appl. Phys. 88 (2000) 6327
31. Lim J.-W., Park H.-S., and Kang S.-W. J. Electrochem. Soc. 148 (2001) C403
32. Alam M.A., and Green M.L. J. Appl. Phys. 94 (2003) 3403
33. Puurunen R.L. Chem. Vap. Depos. 10 (2004) 159
34. Puurunen R.L., and Vandervorst W. J. Appl. Phys. 96 (2004) 7686
35. Puurunen R.L. J. Appl. Phys. 95 (2004) 4777
36. W.F.A. Besling, L.M. Michaelson, M. Harrison, X. Houziaux, T. Dao, Y. Tamminga, T. Guenther, J. Torres, in: D. Erb, P. Ramm, K. Masu, A. Osaki (Eds.), Advanced Metallization Conference 2004, San Diego, U.S.A., October 19-21, and Tokyo, Japan, September 28-29, 2004, Materials Research Society Conference Proceedings (2005) 757.
37. Markov I.V. Crystal Growth for Beginners - Fundamentals of Nucleation, Crystal Growth and Epitaxy (1995), World Scientific, Singapore
38. Buckley H.E. Crystal Growth (1951), Wiley, New York
39. Holden A., and Singer P. Crystals and Crystal Growing (1960), Anchor Books, New York
40. Burton W.K., Cabrera N., and Frank F.C. Philos. Trans. R. Soc. 243 (1951) 299
41. van der Drift A. Philips Res. Rep. 22 (1967) 267
42. Carter G. Vacuum 56 (2000) 87
43. Rodriguez-Navarro A.B. Thin Solid Films 389 (2001) 288
44. Ylilammi M. Thin Solid Films 279 (1996) 124
45. Leskelä M., Niinistö L., Nykänen E., Soininen P., and Tiitta M. Thermochim. Acta 175 (1991) 91