A study of atomic layer deposited LiAlxOy films on Mg-Li alloys

Thin Solid Films

Volumn 518, Issue 24, 2010, Pages 7501-7504

  Wang, P C ^a   Shih, Y T ^a   Lin, M C ^a   Lin, H C ^a   Chen, M J ^a   Lin, K M ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

Atomic layer deposition; Corrosion resistance; LiAlxOy film; Mg Li alloy

Indexed keywords

AMORPHOUS STRUCTURES; ATOMIC LAYER DEPOSITED; ATOMIC RATIO; FREE STRUCTURES; LIALXOY FILM; MG-LI ALLOY;

ALLOYS; AMORPHOUS FILMS; ATOMIC LAYER DEPOSITION; ATOMS; CERIUM ALLOYS; CORROSION RESISTANCE;

LITHIUM ALLOYS;

EID: 77956885295     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.05.033     Document Type: Conference Paper

References (24)

1. S. Celotto Acta Mater. 48 2000 1775
2. B.L. Mordike, and T. Ebert Mater. Sci. Eng., A 302 2001 37
3. C.H. Caceres, C.J. Davidson, J.R. Griffiths, and C.L. Newton Mater. Sci. Eng., A 325 2002 344
4. H. Haferkamp, R. Boehm, U. Holzkamp, C. Jaschik, V. Kaese, and M. Niemeyer Mater. Trans. 42 2001 1160
5. T.C. Chang, J.Y. Wang, C.L. Chu, and S. Lee Mater. Lett. 60 2006 3272
6. I. Shigematsu, M. Nakamura, N. Saitou, and K. Shimojima J. Mater. Sci. Lett. 19 2000 473
7. F. Stippich, E. Vera, G.K. Wolf, G. Berg, and Chr. Friedrich Surf. Coat. Technol. 103-104 1998 29
8. R. Rodríguez-Clemente, B. Aspar, N. Azema, B. Armas, C. Combescure, J. Durand, and A. Figueras J. Cryst. Growth 133 1993 5
9. J.F. Fälth, S.K. Davidsson, X.Y. Liu, and T.G. Andersson Appl. Phys. Lett. 87 2005 161901
10. E. Rille, R. Zarwasch, and H.K. Pulker Thin Solid Films 228 1993 215
11. H. Altun, and S. Sen Surf. Coat. Technol. 197 2005 193
12. M. Leskela, and M. Ritala Angew. Chem. Int. Ed. 42 2003 5548
13. B.S. Lim, A. Rahtu, and R.G. Gordon Nat. Mater. 2 2003 749
14. C.X. Shan, X. Hou, K.L. Choy, and P. Choquet Surf. Coat. Technol. 202 2008 2147
15. C.X. Shan, X. Hou, and K.L. Choy Surf. Coat. Technol. 202 2008 2399
16. R. Matero, M. Ritala, M. Leskelä, T. Salo, J. Aromaa, and O. Forsén J. Phys. IV France 9 1999 Pr8
17. S.M. George, A.W. Ott, and J.W. Klaus J. Phys. Chem. 100 1996 13121
18. G.S. Higashi, and C.G. Fleming Appl. Phys. Lett. 55 1989 1963
19. A.C. Dillon, A.W. Ott, J.D. Way, and S.M. George Surf. Sci. 322 1995 230
20. A.W. Ott, J.W. Klaus, J.M. Johnson, and S.M. George Thin Solid Films 292 1997 135
21. M.V. Koudriachova, N.M. Harrison, and S.W. de Leeuw Solid State Ionics 157 2003 35
22. K. Kinoshita, J.W. Sim, and J.P. Acderman Mater. Res. Bull. 13 1978 445
23. S. PalDey, and S.C. Deevi Mater. Sci. Eng., A 342 2003 58
24. Y.H. Yoo, D.P. Le, J.G. Kim, S.K. Kim, and P.V. Vinh Thin Solid Films 516 2008 3544