Ion energy distribution function in dual-frequency rf capacitively coupled discharges: Analytical model

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 78, Issue 2, 2008, Pages

  Olevanov, M ^a   Proshina, O ^a   Rakhimova, T ^a   Voloshin, D ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTER SIMULATION; DISCHARGE (FLUID MECHANICS); DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; FLUID MECHANICS; FLUORESCENCE; INERT GASES; ION BEAMS; PLASMA SOURCES;

ANALYTICAL APPROACHES; ANALYTICAL EXPRESSIONS; ANALYTICAL MODELLING; ANALYTICAL THEORY; CAPACITIVELY COUPLED DISCHARGES; COLLISIONLESS; DUAL-FREQUENCY; FREQUENCY RELATIONS; INTERMEDIATE FREQUENCIES; ION ENERGIES; ION ENERGY DISTRIBUTION FUNCTION; ION SPECTRUM; MONTE CARLO; NUMERICAL SIMULATIONS; PARTICLE IN CELLS; PROCESSING TECHNOLOGIES; RF DISCHARGES;

IONS;

EID: 49549115107     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.78.026404     Document Type: Article

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