SCOPUS 정보 검색 플랫폼

Analytical and Bioanalytical Chemistry

Volumn 396, Issue 8, 2010, Pages 2769-2783

Acoustics and atomic force microscopy for the mechanical characterization of thin films

(3) Passeri, Daniele a,b Bettucci, Andrea a Rossi, Marco a

a SAPIENZA UNIVERSITY OF ROME (Italy)

b Consorzio Nazionale Interuniversitario per le Scienze Fisiche della Materia ^* (Italy)

Author keywords

Atomic force microscopy; Interface surface analysis; Mechanical properties; Thin film; Ultrasonics

Indexed keywords

ACOUSTIC MICROSCOPY; AFM; BURIED INTERFACE; HIGH FREQUENCY HF; INDENTATION TEST; INTERFACE/SURFACE ANALYSIS; LATERAL RESOLUTION; MECHANICAL CHARACTERIZATIONS; MICROMACHINED; NANOMETRICS; NONDESTRUCTIVE METHODS; QUALITATIVE IMAGING; QUANTITATIVE CHARACTERIZATION; QUANTITATIVE MAPPING; SAMPLE SURFACE; SAMPLE VOLUME; SCIENCE AND TECHNOLOGY; SPATIAL RESOLUTION; SPOT MEASUREMENTS; SUBSTRATE EFFECTS; SUBSURFACE DEFECT; THIN-FILM CHARACTERIZATION; TIP-SAMPLE CONTACT; ULTRASONIC TECHNIQUES; VERSATILE TOOLS;

ATOMIC FORCE MICROSCOPY; ATOMS; CRACK DETECTION; ELASTIC MODULI; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; ULTRASONIC TESTING; ULTRASONICS; ULTRATHIN FILMS;

MECHANICAL PROPERTIES;

EID: 77951298970 PISSN: 16182642 EISSN: 16182650 Source Type: Journal
DOI: 10.1007/s00216-009-3402-8 Document Type: Review

Times cited : (29)

References (136)

1
- 2342629966
- Y Fu H Du W Huang S Zhang M Hu 2004 Sens Actuators A Phys 112 395
- (2004) Sens Actuators A Phys , vol.112 , pp. 395
- Fu, Y.¹ Du, H.² Huang, W.³ Zhang, S.⁴ Hu, M.⁵

2
- 0021166548
- 1:CAS:528:DyaL2cXnslynug%3D%3D
- AL Dawar JC Joshi 1984 J Mater Sci 19 1 1:CAS:528:DyaL2cXnslynug%3D%3D
- (1984) J Mater Sci , vol.19 , pp. 1
- Dawar, A.L.¹ Joshi, J.C.²

3
- 0037116556
- 1:CAS:528:DC%2BD38XhtVartbY%3D
- CD Dimitrakopoulos PRL Malenfant 2002 Adv Mater 14 99 1:CAS:528:DC%2BD38XhtVartbY%3D
- (2002) Adv Mater , vol.14 , pp. 99
- Dimitrakopoulos, C.D.¹ Malenfant, P.R.L.²

4
- 84957229108
- 1:CAS:528:DyaK3MXks1WktLc%3D
- GH Haertling 1991 J Vac Sci Technol A 9 414 1:CAS:528:DyaK3MXks1WktLc%3D
- (1991) J Vac Sci Technol A , vol.9 , pp. 414
- Haertling, G.H.¹

5
- 29144456398
- 1:CAS:528:DC%2BD28XltlOl
- M Dawber KM Rabe JF Scott 2005 Rev Mod Phys 77 1083 1:CAS:528: DC%2BD28XltlOl
- (2005) Rev Mod Phys , vol.77 , pp. 1083
- Dawber, M.¹ Rabe, K.M.² Scott, J.F.³

6
- 33748892269
- N Setter, et al. 2006 J Appl Phys 100 051606
- (2006) J Appl Phys , vol.100 , pp. 051606
- Setter, N.¹

7
- 0001417170
- 1:CAS:528:DyaK1cXkvVKrsLw%3D
- AH Lettington 1998 Carbon 36 555 1:CAS:528:DyaK1cXkvVKrsLw%3D
- (1998) Carbon , vol.36 , pp. 555
- Lettington, A.H.¹

8
- 29544444088
- 1:CAS:528:DC%2BD28XhsF2jug%3D%3D
- JT Mabeck GG Malliaras 2006 Anal Bioanal Chem 384 343 1:CAS:528:DC%2BD28XhsF2jug%3D%3D
- (2006) Anal Bioanal Chem , vol.384 , pp. 343
- Mabeck, J.T.¹ Malliaras, G.G.²

9
- 29644446478
- 1:CAS:528:DC%2BD28XhsF2isg%3D%3D
- C Bartic G Borghs 2006 Anal Bioanal Chem 384 354 1:CAS:528: DC%2BD28XhsF2isg%3D%3D
- (2006) Anal Bioanal Chem , vol.384 , pp. 354
- Bartic, C.¹ Borghs, G.²

10
- 0031701257
- 1:CAS:528:DyaK1cXhs1Whtb0%3D
- PD Rack PH Holloway 1998 Mater Sci Eng R21 171 1:CAS:528: DyaK1cXhs1Whtb0%3D
- (1998) Mater Sci Eng , vol.21 , pp. 171
- Rack, P.D.¹ Holloway, P.H.²

11
- 1842781640
- 1:CAS:528:DC%2BD2cXjslygsbY%3D
- KL Chopra PD Paulson V Dutta 2004 Prog Photovolt Res Appl 12 69 1:CAS:528:DC%2BD2cXjslygsbY%3D
- (2004) Prog Photovolt Res Appl , vol.12 , pp. 69
- Chopra, K.L.¹ Paulson, P.D.² Dutta, V.³

12
- 84947669494
- 1:CAS:528:DyaL2sXmsVynu7g%3D
- HC Tsai DB Bogy 1987 J Vac Sci Technol A 5 3287 1:CAS:528: DyaL2sXmsVynu7g%3D
- (1987) J Vac Sci Technol A , vol.5 , pp. 3287
- Tsai, H.C.¹ Bogy, D.B.²

13
- 0034233158
- 1:CAS:528:DC%2BD3cXlsFeqsbk%3D
- K Kato 2000 Wear 241 151 1:CAS:528:DC%2BD3cXlsFeqsbk%3D
- (2000) Wear , vol.241 , pp. 151
- Kato, K.¹

14
- 0037129133
- 1:CAS:528:DC%2BD38XhvVWltb8%3D
- JE Gray B Luan 2002 J Alloy Compd 336 88 1:CAS:528:DC%2BD38XhvVWltb8%3D
- (2002) J Alloy Compd , vol.336 , pp. 88
- Gray, J.E.¹ Luan, B.²

15
- 0037461209
- 1:CAS:528:DC%2BD3sXitV2js70%3D
- S Zhang D Sun Y Fu H Du 2003 Surf Coat Technol 167 113 1:CAS:528:DC%2BD3sXitV2js70%3D
- (2003) Surf Coat Technol , vol.167 , pp. 113
- Zhang, S.¹ Sun, D.² Fu, Y.³ Du, H.⁴

16
- 0037852937
- 1:CAS:528:DC%2BD3sXjsVektr0%3D
- R Hauert 2003 Diamond Relat Mater 12 583 1:CAS:528:DC%2BD3sXjsVektr0%3D
- (2003) Diamond Relat Mater , vol.12 , pp. 583
- Hauert, R.¹

17
- 0033874950
- 1:CAS:528:DC%2BD3cXmtVCltA%3D%3D
- F Spaepen 2000 Acta Mater 48 31 1:CAS:528:DC%2BD3cXmtVCltA%3D%3D
- (2000) Acta Mater , vol.48 , pp. 31
- Spaepen, F.¹

18
- 0037039675
- 1:CAS:528:DC%2BD38XjvFegtA%3D%3D
- AA Volinsky NR Moody WW Gerberich 2002 Acta Mater 50 441 1:CAS:528:DC%2BD38XjvFegtA%3D%3D
- (2002) Acta Mater , vol.50 , pp. 441
- Volinsky, A.A.¹ Moody, N.R.² Gerberich, W.W.³

19
- 0029721299
- 1:CAS:528:DyaK28XkvFGmsLg%3D
- RP Vinci D Gross 1996 Annu Rev Mater Sci 26 431 1:CAS:528: DyaK28XkvFGmsLg%3D
- (1996) Annu Rev Mater Sci , vol.26 , pp. 431
- Vinci, R.P.¹ Gross, D.²

20
- 0041345927
- 1:CAS:528:DC%2BD3sXlvVOls74%3D
- B Bhushan X Li 2003 Int Mater Rev 48 125 1:CAS:528:DC%2BD3sXlvVOls74%3D
- (2003) Int Mater Rev , vol.48 , pp. 125
- Bhushan, B.¹ Li, X.²

21
- 0004162928
- Springer Berlin
- Krautkrämer J, Krautkrämer H (1983) Ultrasonic testing of materials. Springer, Berlin
- (1983) Ultrasonic Testing of Materials
- Krautkrämer, J.¹ Krautkrämer, H.²

22
- 33746610251
- KH Lin, et al. 2006 Appl Phys Lett 89 043106
- (2006) Appl Phys Lett , vol.89 , pp. 043106
- Lin, K.H.¹

23
- 0035447472
- 1:CAS:528:DC%2BD3MXmvVyrsLY%3D
- DC Hurley VK Tewary AJ Richards 2001 Meas Sci Technol 12 1486 1:CAS:528:DC%2BD3MXmvVyrsLY%3D
- (2001) Meas Sci Technol , vol.12 , pp. 1486
- Hurley, D.C.¹ Tewary, V.K.² Richards, A.J.³

24
- 17444393211
- TT Wu YY Chen GT Huang PZ Chang 2005 J Appl Phys 97 073510
- (2005) J Appl Phys , vol.97 , pp. 073510
- Wu, T.T.¹ Chen, Y.Y.² Huang, G.T.³ Chang, P.Z.⁴

25
- 59149085840
- R Côte T Van der Donck JP Celis C Glorieux 2009 Thin Solid Films 517 2697
- (2009) Thin Solid Films , vol.517 , pp. 2697
- Côte, R.¹ Van Der Donck, T.² Celis, J.P.³ Glorieux, C.⁴

26
- 77951297853
- CF Quate 1985 Phys Today 34 34
- (1985) Phys Today , vol.34 , pp. 34
- Quate, C.F.¹

27
- 0004288175
- Oxford University Press New York
- Briggs A (1992) Acoustic microscopy. Oxford University Press, New York
- (1992) Acoustic Microscopy
- Briggs, A.¹

28
- 84889446294
- Wiley Weinheim
- Maev RG (2008) Acoustic microscopy - fundamentals and applications. Wiley, Weinheim
- (2008) Acoustic Microscopy - Fundamentals and Applications
- Maev, R.G.¹

29
- 0034259651
- 1:CAS:528:DC%2BD3cXmsFGku70%3D
- AC Fischer-Cripps 2000 Vacuum 58 569 1:CAS:528:DC%2BD3cXmsFGku70%3D
- (2000) Vacuum , vol.58 , pp. 569
- Fischer-Cripps, A.C.¹

30
- 0036478720
- 1:CAS:528:DC%2BD38XlsVaksLs%3D
- X Li B Bhushan 2002 Mater Charact 48 11 1:CAS:528:DC%2BD38XlsVaksLs%3D
- (2002) Mater Charact , vol.48 , pp. 11
- Li, X.¹ Bhushan, B.²

31
- 23844517715
- CC White MR Vanlandingham PL Drzal NK Chang SH Chang 2005 J Polym Sci B Polym Phys 43 1794
- (2005) J Polym Sci B Polym Phys , vol.43 , pp. 1794
- White, C.C.¹ Vanlandingham, M.R.² Drzal, P.L.³ Chang, N.K.⁴ Chang, S.H.⁵

32
- 33644693571
- 1:CAS:528:DC%2BD28XitVamtL4%3D
- AC Fischer-Cripps 2006 Surf Coat Technol 200 4153 1:CAS:528: DC%2BD28XitVamtL4%3D
- (2006) Surf Coat Technol , vol.200 , pp. 4153
- Fischer-Cripps, A.C.¹

33
- 0041764523
- JJ Vlassak M Ciavarella JR Barber X Wang 2003 J Mech Phys Solids 51 1701
- (2003) J Mech Phys Solids , vol.51 , pp. 1701
- Vlassak, J.J.¹ Ciavarella, M.² Barber, J.R.³ Wang, X.⁴

34
- 23844538125
- 1:CAS:528:DC%2BD2MXlvFCqt7k%3D
- CC White MR Vanlandingham PL Drzal NK Chang SH Chang 2005 J Polym Sci B Polym Phys 43 1812 1:CAS:528:DC%2BD2MXlvFCqt7k%3D
- (2005) J Polym Sci B Polym Phys , vol.43 , pp. 1812
- White, C.C.¹ Vanlandingham, M.R.² Drzal, P.L.³ Chang, N.K.⁴ Chang, S.H.⁵

35
- 0001595276
- SA Syed Asif KJ Wahl RJ Colton 1999 Rev Sci Instrum 70 2408
- (1999) Rev Sci Instrum , vol.70 , pp. 2408
- Syed Asif, S.A.¹ Wahl, K.J.² Colton, R.J.³

36
- 0035424776
- 1:CAS:528:DC%2BD3MXlt12msro%3D
- SA Syed Asif KJ Wahl RJ Colton OL Warren 2001 J Appl Phys 90 1192 1:CAS:528:DC%2BD3MXlt12msro%3D
- (2001) J Appl Phys , vol.90 , pp. 1192
- Syed Asif, S.A.¹ Wahl, K.J.² Colton, R.J.³ Warren, O.L.⁴

37
- 0011713787
- IN Sneddon 1965 Int J Eng Sci 3 47
- (1965) Int J Eng Sci , vol.3 , pp. 47
- Sneddon, I.N.¹

38
- 0026836958
- 1:CAS:528:DyaK38Xhsl2isbg%3D
- GM Pharr WC Oliver FR Brotzen 1992 J Mater Res 7 613 1:CAS:528: DyaK38Xhsl2isbg%3D
- (1992) J Mater Res , vol.7 , pp. 613
- Pharr, G.M.¹ Oliver, W.C.² Brotzen, F.R.³

39
- 3042606295
- 1:CAS:528:DC%2BD2cXjtlOmtLg%3D
- WC Oliver GM Pharr 2004 J Mater Res 19 3 1:CAS:528:DC%2BD2cXjtlOmtLg%3D
- (2004) J Mater Res , vol.19 , pp. 3
- Oliver, W.C.¹ Pharr, G.M.²

40
- 0026875935
- 1:CAS:528:DyaK38XktlWqtb4%3D
- WC Oliver GM Pharr 1992 J Mater Res 7 1564 1:CAS:528:DyaK38XktlWqtb4%3D
- (1992) J Mater Res , vol.7 , pp. 1564
- Oliver, W.C.¹ Pharr, G.M.²

41
- 0032636491
- M Ciavarella 1999 Int J Solids Struct 36 4149
- (1999) Int J Solids Struct , vol.36 , pp. 4149
- Ciavarella, M.¹

42
- 9944223661
- AHW Ngan HT Wang B Tang KY Sze 2005 Int J Solids Struct 42 1831
- (2005) Int J Solids Struct , vol.42 , pp. 1831
- Ngan, A.H.W.¹ Wang, H.T.² Tang, B.³ Sze, K.Y.⁴

43
- 38749147660
- 1:CAS:528:DC%2BD1cXhvFyhtbg%3D
- YF Gao HT Xu WC Oliver GM Pharr 2008 J Mech Phys Solids 56 402 1:CAS:528:DC%2BD1cXhvFyhtbg%3D
- (2008) J Mech Phys Solids , vol.56 , pp. 402
- Gao, Y.F.¹ Xu, H.T.² Oliver, W.C.³ Pharr, G.M.⁴

44
- 0023533637
- RB King 1987 Int J Solids Struct 23 1657
- (1987) Int J Solids Struct , vol.23 , pp. 1657
- King, R.B.¹

45
- 45549118580
- AK Bhattacharya WD Nix 1988 Int J Solids Struct 24 1287
- (1988) Int J Solids Struct , vol.24 , pp. 1287
- Bhattacharya, A.K.¹ Nix, W.D.²

46
- 0027085491
- H Gao CH Chiu J Lee 1992 Int J Solids Struct 29 2471
- (1992) Int J Solids Struct , vol.29 , pp. 2471
- Gao, H.¹ Chiu, C.H.² Lee, J.³

47
- 6344248912
- 1:CAS:528:DC%2BD2cXotl2isb0%3D
- YG Jung BR Lawn M Martyniuk H Huang XZ Hu 2004 J Mater Res 19 3076 1:CAS:528:DC%2BD2cXotl2isb0%3D
- (2004) J Mater Res , vol.19 , pp. 3076
- Jung, Y.G.¹ Lawn, B.R.² Martyniuk, M.³ Huang, H.⁴ Hu, X.Z.⁵

48
- 0002656306
- J.W. Westbrook H. Conrad (eds). American Society for Metals Metals Park
- Buckle H (1973) In: Westbrook JW, Conrad H (eds) The science of hardness testing and its research applications. American Society for Metals, Metals Park, pp 453-491
- (1973) The Science of Hardness Testing and Its Research Applications , pp. 453-491
- Buckle, H.¹

49
- 27944457267
- 1:CAS:528:DC%2BD2MXht1GgtL3K
- CA Clifford MP Seah 2005 Appl Surf Sci 252 1915 1:CAS:528: DC%2BD2MXht1GgtL3K
- (2005) Appl Surf Sci , vol.252 , pp. 1915
- Clifford, C.A.¹ Seah, M.P.²

50
- 0000156345
- P Maivald, et al. 1991 Nanotechnology 2 103
- (1991) Nanotechnology , vol.2 , pp. 103
- Maivald, P.¹

51
- 0030079649
- 1:CAS:528:DyaK28XivVegsrg%3D
- HY Nie M Motomatsu W Mizutani H Tokumoto 1996 Thin Solid Films 273 143 1:CAS:528:DyaK28XivVegsrg%3D
- (1996) Thin Solid Films , vol.273 , pp. 143
- Nie, H.Y.¹ Motomatsu, M.² Mizutani, W.³ Tokumoto, H.⁴

52
- 0000264647
- PE Mazeran JL Loubet 1999 Tribol Lett 7 199
- (1999) Tribol Lett , vol.7 , pp. 199
- Mazeran, P.E.¹ Loubet, J.L.²

53
- 26444516025
- 1:CAS:528:DC%2BD2MXhtV2msrfJ
- AC Diebold 2005 Science 310 61 1:CAS:528:DC%2BD2MXhtV2msrfJ
- (2005) Science , vol.310 , pp. 61
- Diebold, A.C.¹

54
- 26444492607
- 1:CAS:528:DC%2BD2MXhtVOjsr7I
- GS Shekhawat VP Dravid 2005 Science 310 89 1:CAS:528:DC%2BD2MXhtVOjsr7I
- (2005) Science , vol.310 , pp. 89
- Shekhawat, G.S.¹ Dravid, V.P.²

55
- 5544315851
- 1:CAS:528:DyaK28Xisl2jsLs%3D
- NA Burnham AJ Kulik G Gremaud PJ Gallo F Oulevey 1996 J Vac Sci Technol B 14 794 1:CAS:528:DyaK28Xisl2jsLs%3D
- (1996) J Vac Sci Technol B , vol.14 , pp. 794
- Burnham, N.A.¹ Kulik, A.J.² Gremaud, G.³ Gallo, P.J.⁴ Oulevey, F.⁵

56
- 0000598764
- 1:CAS:528:DyaK1cXislOitb4%3D
- F Oulevey, et al. 1998 Rev Sci Instrum 69 2085 1:CAS:528: DyaK1cXislOitb4%3D
- (1998) Rev Sci Instrum , vol.69 , pp. 2085
- Oulevey, F.¹

57
- 0035471927
- 1:CAS:528:DC%2BD3MXntFKnsbw%3D
- E Dupas G Gremaud AJ Kulik JL Loubet 2001 Rev Sci Instrum 72 3891 1:CAS:528:DC%2BD3MXntFKnsbw%3D
- (2001) Rev Sci Instrum , vol.72 , pp. 3891
- Dupas, E.¹ Gremaud, G.² Kulik, A.J.³ Loubet, J.L.⁴

58
- 0000529317
- 1:CAS:528:DyaK28XlslehtLg%3D
- U Rabe J Janser W Arnold 1996 Rev Sci Instrum 67 3281 1:CAS:528:DyaK28XlslehtLg%3D
- (1996) Rev Sci Instrum , vol.67 , pp. 3281
- Rabe, U.¹ Janser, J.² Arnold, W.³

59
- 0036471050
- 1:CAS:528:DC%2BD38XhvF2js7Y%3D
- U Rabe, et al. 2002 Surf Interface Anal 33 65 1:CAS:528: DC%2BD38XhvF2js7Y%3D
- (2002) Surf Interface Anal , vol.33 , pp. 65
- Rabe, U.¹

60
- 0033873704
- 1:CAS:528:DC%2BD3cXitVSqur0%3D
- U Rabe, et al. 2000 Ultrasonics 38 430 1:CAS:528:DC%2BD3cXitVSqur0%3D
- (2000) Ultrasonics , vol.38 , pp. 430
- Rabe, U.¹

61
- 0033729248
- 1:CAS:528:DC%2BD3cXktlyqtbk%3D
- E Kester U Rabe L Presmanes P Tailhades W Arnold 2000 J Phys Chem Solids 61 1275 1:CAS:528:DC%2BD3cXktlyqtbk%3D
- (2000) J Phys Chem Solids , vol.61 , pp. 1275
- Kester, E.¹ Rabe, U.² Presmanes, L.³ Tailhades, P.⁴ Arnold, W.⁵

62
- 0035939507
- 1:CAS:528:DC%2BD3MXksVymtro%3D
- S Amelio, et al. 2001 Thin Solid Films 392 75 1:CAS:528: DC%2BD3MXksVymtro%3D
- (2001) Thin Solid Films , vol.392 , pp. 75
- Amelio, S.¹

63
- 0042424601
- 1:CAS:528:DC%2BD3sXlvFCrtro%3D
- DC Hurley K Shen NM Jennett JA Turner 2003 J Appl Phys 94 2347 1:CAS:528:DC%2BD3sXlvFCrtro%3D
- (2003) J Appl Phys , vol.94 , pp. 2347
- Hurley, D.C.¹ Shen, K.² Jennett, N.M.³ Turner, J.A.⁴

64
- 0027643009
- 1:CAS:528:DyaK3sXmsFOjt7Y%3D
- O Kolosov K Yamanaka 1993 Jpn J Appl Phys Part 2 32 L1095 1:CAS:528:DyaK3sXmsFOjt7Y%3D
- (1993) Jpn J Appl Phys Part 2 , vol.32 , pp. 1095
- Kolosov, O.¹ Yamanaka, K.²

65
- 4243519048
- 1:CAS:528:DC%2BD3cXjs1SmurY%3D
- F Dinelli SK Biswas GAD Briggs O Kolosov 2000 Phys Rev B 61 13995 1:CAS:528:DC%2BD3cXjs1SmurY%3D
- (2000) Phys Rev B , vol.61 , pp. 13995
- Dinelli, F.¹ Biswas, S.K.² Briggs, G.A.D.³ Kolosov, O.⁴

66
- 0032682065
- 1:CAS:528:DyaK1MXjsVynt7s%3D
- F Dinelli HE Assender N Takeda GAD Briggs OV Kolosov 1999 Surf Interface Anal 27 562 1:CAS:528:DyaK1MXjsVynt7s%3D
- (1999) Surf Interface Anal , vol.27 , pp. 562
- Dinelli, F.¹ Assender, H.E.² Takeda, N.³ Briggs, G.A.D.⁴ Kolosov, O.V.⁵

67
- 36448999007
- 1:CAS:528:DyaK2cXhslCiurc%3D
- K Yamanaka H Ogiso OV Kolosov 1994 Appl Phys Lett 64 178 1:CAS:528:DyaK2cXhslCiurc%3D
- (1994) Appl Phys Lett , vol.64 , pp. 178
- Yamanaka, K.¹ Ogiso, H.² Kolosov, O.V.³

68
- 0001162851
- 1:CAS:528:DyaK1cXkvFShtL8%3D
- OV Kolosov, et al. 1998 Phys Rev Lett 81 1046 1:CAS:528: DyaK1cXkvFShtL8%3D
- (1998) Phys Rev Lett , vol.81 , pp. 1046
- Kolosov, O.V.¹

69
- 0018529739
- W Parmon HL Bertoni 1979 Electron Lett 15 684
- (1979) Electron Lett , vol.15 , pp. 684
- Parmon, W.¹ Bertoni, H.L.²

70
- 0028756284
- M. Levy S.C. Schneider B.R. McAvoy (eds). IEEE Piscataway
- Richard P, Gremaud G, Kulik A (1999) In: Levy M, Schneider SC, McAvoy BR (eds) Proceedings of the 1994 IEEE ultrasonics symposium. IEEE, Piscataway, p 1425
- (1999) Proceedings of the 1994 IEEE Ultrasonics Symposium , pp. 1425
- Richard, P.¹ Gremaud, G.² Kulik, A.³

71
- 0022027260
- Kushibiki J, Chubachi N (1985) IEEE Trans Sonics Ultrason SU-33:189
- (1985) IEEE Trans Sonics Ultrason SU-33 , pp. 189
- Kushibiki, J.¹ Chubachi, N.²

72
- 0001133424
- A. Briggs (eds). Plenum New York
- Achenbach JD, Kim JO, Lee Y (1995) In: Briggs A (ed) Advances in acoustic microscopy, vol 1. Plenum, New York, pp 153-208
- (1995) Advances in Acoustic Microscopy , vol.1 , pp. 153-208
- Achenbach, J.D.¹ Kim, J.O.² Lee, Y.³

73
- 0000474953
- A. Briggs (eds). Plenum New York
- Sklar Z, Mutti P, Stoodley NC, Briggs GAD (1995) In: Briggs A (ed) Advances in acoustic microscopy, vol 1. Plenum, New York, pp 209-247
- (1995) Advances in Acoustic Microscopy , vol.1 , pp. 209-247
- Sklar, Z.¹ Mutti, P.² Stoodley, N.C.³ Briggs, G.A.D.⁴

74
- 20844451326
- S Banerjee N Gayathri S Dash AK Tyagi B Raj 2005 Appl Phys Lett 86 211913
- (2005) Appl Phys Lett , vol.86 , pp. 211913
- Banerjee, S.¹ Gayathri, N.² Dash, S.³ Tyagi, A.K.⁴ Raj, B.⁵

75
- 0030165681
- Yamanaka K, Nakano S (1996) Jpn J Appl Phys Part 1 35:3787
- (1996) Jpn J Appl Phys Part 1 , vol.35 , pp. 3787
- Yamanaka, K.¹ Nakano, S.²

76
- 0035279031
- 1:CAS:528:DC%2BD3MXjt1Srsr8%3D
- MT Cuberes GAD Briggs OV Kolosov 2001 Nanotechnology 12 53 1:CAS:528:DC%2BD3MXjt1Srsr8%3D
- (2001) Nanotechnology , vol.12 , pp. 53
- Cuberes, M.T.¹ Briggs, G.A.D.² Kolosov, O.V.³

77
- 43349107886
- K Schwarz U Rabe S Hirsekorn W Arnold 2008 Appl Phys Lett 92 183105
- (2008) Appl Phys Lett , vol.92 , pp. 183105
- Schwarz, K.¹ Rabe, U.² Hirsekorn, S.³ Arnold, W.⁴

78
- 33846787059
- U Rabe, et al. 2007 Nanotechnology 18 044008
- (2007) Nanotechnology , vol.18 , pp. 044008
- Rabe, U.¹

79
- 0036478573
- Tsuji T, Irihama H, Yamanaka K (2002) Jpn J Appl Phys Part 1 41:832
- (2002) Jpn J Appl Phys Part 1 , vol.41 , pp. 832
- Tsuji, T.¹ Irihama, H.² Yamanaka, K.³

80
- 38849198665
- AB Kos DC Hurley 2008 Meas Sci Technol 19 015504
- (2008) Meas Sci Technol , vol.19 , pp. 015504
- Kos, A.B.¹ Hurley, D.C.²

81
- 0032663455
- 1:CAS:528:DyaK1MXjsVyns7c%3D
- U Rabe E Kester W Arnold 1999 Surf Interface Anal 27 386 1:CAS:528:DyaK1MXjsVyns7c%3D
- (1999) Surf Interface Anal , vol.27 , pp. 386
- Rabe, U.¹ Kester, E.² Arnold, W.³

82
- 0038521680
- M Reinstaedtler U Rabe V Scherer JA Turner W Arnold 2003 Surf Sci 532 1152
- (2003) Surf Sci , vol.532 , pp. 1152
- Reinstaedtler, M.¹ Rabe, U.² Scherer, V.³ Turner, J.A.⁴ Arnold, W.⁵

83
- 0035442763
- JA Turner JS Wiehn 2001 Nanotechnology 12 322
- (2001) Nanotechnology , vol.12 , pp. 322
- Turner, J.A.¹ Wiehn, J.S.²

84
- 55949115547
- 1:CAS:528:DC%2BD1cXhtlyktrnK
- MH Mahdavi A Farshidianfar M Tahani S Mahdavi H Dalir 2008 Ultramicroscopy 109 54 1:CAS:528:DC%2BD1cXhtlyktrnK
- (2008) Ultramicroscopy , vol.109 , pp. 54
- Mahdavi, M.H.¹ Farshidianfar, A.² Tahani, M.³ Mahdavi, S.⁴ Dalir, H.⁵

85
- 54049133276
- PA Yuya DC Hurley JA Turner 2008 J Appl Phys 104 074916
- (2008) J Appl Phys , vol.104 , pp. 074916
- Yuya, P.A.¹ Hurley, D.C.² Turner, J.A.³

86
- 9744234404
- 1:CAS:528:DC%2BD2MXhsV2lsg%3D%3D
- K Shen DC Hurley JA Turner 2004 Nanotechnology 15 1582 1:CAS:528:DC%2BD2MXhsV2lsg%3D%3D
- (2004) Nanotechnology , vol.15 , pp. 1582
- Shen, K.¹ Hurley, D.C.² Turner, J.A.³

87
- 33746844552
- 1:CAS:528:DC%2BD28XnvFWgtL0%3D
- HL Lee YC Yang WJ Chang SS Chu 2006 Jpn J Appl Phys 45 6017 1:CAS:528:DC%2BD28XnvFWgtL0%3D
- (2006) Jpn J Appl Phys , vol.45 , pp. 6017
- Lee, H.L.¹ Yang, Y.C.² Chang, W.J.³ Chu, S.S.⁴

88
- 0346246849
- 1:CAS:528:DyaK1cXntV2ms7k%3D
- U Rabe J Turner W Arnold 1998 Appl Phys A 66 S277 1:CAS:528: DyaK1cXntV2ms7k%3D
- (1998) Appl Phys A , vol.66 , pp. 277
- Rabe, U.¹ Turner, J.² Arnold, W.³

89
- 0028422252
- TJ Senden WA Ducker 1994 Langmuir 10 1003
- (1994) Langmuir , vol.10 , pp. 1003
- Senden, T.J.¹ Ducker, W.A.²

90
- 0027540056
- 1:CAS:528:DyaK3sXhvFyqtbc%3D
- JP Cleveland S Manne D Bocek PK Hansma 1993 Rev Sci Instrum 64 403 1:CAS:528:DyaK3sXhvFyqtbc%3D
- (1993) Rev Sci Instrum , vol.64 , pp. 403
- Cleveland, J.P.¹ Manne, S.² Bocek, D.³ Hansma, P.K.⁴

91
- 0001155528
- 1:CAS:528:DyaK1MXmt1yhtr4%3D
- JE Sader JWM Chon P Mulvaney 1999 Rev Sci Instrum 70 3967 1:CAS:528:DyaK1MXmt1yhtr4%3D
- (1999) Rev Sci Instrum , vol.70 , pp. 3967
- Sader, J.E.¹ Chon, J.W.M.² Mulvaney, P.³

92
- 77951297431
- PhD thesis, University of Rome "La Sapienza"
- Passeri D (2007) Tecniche non distruttive di caratterizzazione meccanica ed elettromeccanica di materiali dalla scala macroscopica a quella nanoscopica. PhD thesis, University of Rome "La Sapienza"
- (2007) Tecniche Non Distruttive di Caratterizzazione Meccanica Ed Elettromeccanica di Materiali Dalla Scala Macroscopica A Quella Nanoscopica
- Passeri, D.¹

93
- 34548022867
- DC Hurley JA Turner 2007 J Appl Phys 102 033509
- (2007) J Appl Phys , vol.102 , pp. 033509
- Hurley, D.C.¹ Turner, J.A.²

94
- 0027578572
- 1:CAS:528:DyaK2MXmtlGhs70%3D
- AL Weisenhorn M Khorsandi S Kasas V Gotzos HJ Butt 1993 Nanotechnology 4 106 1:CAS:528:DyaK2MXmtlGhs70%3D
- (1993) Nanotechnology , vol.4 , pp. 106
- Weisenhorn, A.L.¹ Khorsandi, M.² Kasas, S.³ Gotzos, V.⁴ Butt, H.J.⁵

95
- 33846049563
- Y Zheng RE Geer K Dovidenko M Kopycinska-Müller DC Hurley 2006 J Appl Phys 100 124308
- (2006) J Appl Phys , vol.100 , pp. 124308
- Zheng, Y.¹ Geer, R.E.² Dovidenko, K.³ Kopycinska-Müller, M.⁴ Hurley, D.C.⁵

96
- 84961711983
- doi: 10.1109/IITC.2002.1014945
- Muthuswami L, Moyer ES, Li Z, Geer RE (2002) In: Interconnect technology conference, 2002. Proceedings of the IEEE 2002 international, pp 239-241. doi: 10.1109/IITC.2002.1014945
- (2002) Interconnect Technology Conference, 2002. Proceedings of the IEEE 2002 International , pp. 239-241
- Muthuswami, L.¹ Moyer, E.S.² Li, Z.³ Geer, R.E.⁴

97
- 0032069243
- 1:CAS:528:DyaK1cXivValur4%3D
- V Bykov A Gologanov V Shevyakov 1998 Appl Phys A 66 499 1:CAS:528:DyaK1cXivValur4%3D
- (1998) Appl Phys A , vol.66 , pp. 499
- Bykov, V.¹ Gologanov, A.² Shevyakov, V.³

98
- 33646020666
- M Kopycinska-Müller RH Geiss DC Hurley 2006 Ultramicroscopy 106 466
- (2006) Ultramicroscopy , vol.106 , pp. 466
- Kopycinska-Müller, M.¹ Geiss, R.H.² Hurley, D.C.³

99
- 25844437506
- D Passeri, et al. 2005 Rev Sci Instrum 76 093904
- (2005) Rev Sci Instrum , vol.76 , pp. 093904
- Passeri, D.¹

100
- 39649109225
- M Kopycinska-Müller, et al. 2008 Z Phys Chem 222 471
- (2008) Z Phys Chem , vol.222 , pp. 471
- Kopycinska-Müller, M.¹

101
- 33750502271
- G Stan W Price 2006 Rev Sci Instrum 77 103707
- (2006) Rev Sci Instrum , vol.77 , pp. 103707
- Stan, G.¹ Price, W.²

102
- 25144486825
- 1:CAS:528:DC%2BD2MXhtVGiu7jI
- DC Hurley M Kopycinska-Müller AB Kos RH Geiss 2005 Adv Eng Mater 7 713 1:CAS:528:DC%2BD2MXhtVGiu7jI
- (2005) Adv Eng Mater , vol.7 , pp. 713
- Hurley, D.C.¹ Kopycinska-Müller, M.² Kos, A.B.³ Geiss, R.H.⁴

103
- 0037152661
- 1:CAS:528:DC%2BD38XotlagsL4%3D
- U Rabe, et al. 2002 J Phys D 35 2621 1:CAS:528:DC%2BD38XotlagsL4%3D
- (2002) J Phys D , vol.35 , pp. 2621
- Rabe, U.¹

104
- 33846904030
- 1:CAS:528:DC%2BD2sXhvVCltLg%3D
- D Passeri, et al. 2007 Microelectron Eng 84 490 1:CAS:528: DC%2BD2sXhvVCltLg%3D
- (2007) Microelectron Eng , vol.84 , pp. 490
- Passeri, D.¹

105
- 0031188777
- 1:CAS:528:DyaK2sXlsVyls70%3D
- U Rabe V Scherer S Hirsekorn W Arnold 1997 J Vac Sci Technol B 15 1506 1:CAS:528:DyaK2sXlsVyls70%3D
- (1997) J Vac Sci Technol B , vol.15 , pp. 1506
- Rabe, U.¹ Scherer, V.² Hirsekorn, S.³ Arnold, W.⁴

106
- 38049168603
- 1:CAS:528:DC%2BD2sXht1OqtLrM
- VN Bliznyuk, et al. 2007 Langmuir 23 12973 1:CAS:528:DC%2BD2sXht1OqtLrM
- (2007) Langmuir , vol.23 , pp. 12973
- Bliznyuk, V.N.¹

107
- 77951295794
- 8-10 July, Rzeszów, Poland
- Marinello F, Schiavuta P, Vezzu S, Patelli A, Carmignato S, Savio E (2009) In: 12th international conference on metrology and properties of engineering surfaces, 8-10 July, Rzeszów, Poland
- (2009) 12th International Conference on Metrology and Properties of Engineering Surfaces
- Marinello, F.¹ Schiavuta, P.² Vezzu, S.³ Patelli, A.⁴ Carmignato, S.⁵ Savio, E.⁶

108
- 0035834858
- 1:CAS:528:DC%2BD3MXnsl2lt74%3D
- K Porfyrakis OV Kolosov HE Assender 2001 J Appl Polym Sci 82 2790 1:CAS:528:DC%2BD3MXnsl2lt74%3D
- (2001) J Appl Polym Sci , vol.82 , pp. 2790
- Porfyrakis, K.¹ Kolosov, O.V.² Assender, H.E.³

109
- 0035952867
- 1:CAS:528:DC%2BD3MXitFKmsLk%3D
- K Yamanaka Y Maruyama T Tsuji K Nakamoto 2001 Appl Phys Lett 78 1939 1:CAS:528:DC%2BD3MXitFKmsLk%3D
- (2001) Appl Phys Lett , vol.78 , pp. 1939
- Yamanaka, K.¹ Maruyama, Y.² Tsuji, T.³ Nakamoto, K.⁴

110
- 43849085155
- 1:CAS:528:DC%2BD1cXmt1Oms7c%3D
- D Passeri, et al. 2008 Physica E 40 2419 1:CAS:528:DC%2BD1cXmt1Oms7c%3D
- (2008) Physica e , vol.40 , pp. 2419
- Passeri, D.¹

111
- 55149089289
- 1:CAS:528:DC%2BD1cXhtVegtrfL
- A Kumar U Rabe W Arnold 2008 Jpn J Appl Phys 47 6077 1:CAS:528: DC%2BD1cXhtVegtrfL
- (2008) Jpn J Appl Phys , vol.47 , pp. 6077
- Kumar, A.¹ Rabe, U.² Arnold, W.³

112
- 43349108022
- A Kumar U Rabe S Hirsekorn W Arnold 2008 Appl Phys Lett 92 183106
- (2008) Appl Phys Lett , vol.92 , pp. 183106
- Kumar, A.¹ Rabe, U.² Hirsekorn, S.³ Arnold, W.⁴

113
- 27344437046
- 1:CAS:528:DC%2BD2MXht1CnsLzE
- DC Hurley M Kopycinska-Müller AB Kos RH Geiss 2005 Meas Sci Technol 16 2167 1:CAS:528:DC%2BD2MXht1CnsLzE
- (2005) Meas Sci Technol , vol.16 , pp. 2167
- Hurley, D.C.¹ Kopycinska-Müller, M.² Kos, A.B.³ Geiss, R.H.⁴

114
- 33846479528
- DC Hurley M Kopycinska-Müller AB Kos 2007 JOM 59 23
- (2007) JOM , vol.59 , pp. 23
- Hurley, D.C.¹ Kopycinska-Müller, M.² Kos, A.B.³

115
- 29144520583
- 1:CAS:528:DC%2BD2MXkt1Wntro%3D
- DC Hurley, et al. 2005 J Mater Res 20 1186 1:CAS:528:DC%2BD2MXkt1Wntro%3D
- (2005) J Mater Res , vol.20 , pp. 1186
- Hurley, D.C.¹

116
- 33645522265
- D Passeri, et al. 2006 Appl Phys Lett 88 121910
- (2006) Appl Phys Lett , vol.88 , pp. 121910
- Passeri, D.¹

117
- 44949122514
- G Stan RF Cook 2008 Nanotechnology 19 235701
- (2008) Nanotechnology , vol.19 , pp. 235701
- Stan, G.¹ Cook, R.F.²

118
- 0037092290
- M Prasad M Kopycinska U Rabe W Arnold 2002 Geophys Res Lett 29 1172
- (2002) Geophys Res Lett , vol.29 , pp. 1172
- Prasad, M.¹ Kopycinska, M.² Rabe, U.³ Arnold, W.⁴

119
- 0033900434
- F Iwate T Matsumoto A Sasaki 2000 Nanotechnology 11 10
- (2000) Nanotechnology , vol.11 , pp. 10
- Iwate, F.¹ Matsumoto, T.² Sasaki, A.³

120
- 67449149692
- 1:CAS:528:DC%2BD1MXnvVarsLk%3D
- G Stan, et al. 2009 Ultramicroscopy 109 929 1:CAS:528: DC%2BD1MXnvVarsLk%3D
- (2009) Ultramicroscopy , vol.109 , pp. 929
- Stan, G.¹

121
- 38049102840
- 1:CAS:528:DC%2BD2sXhtlaisb3P
- L Muthaswami, et al. 2007 Nano Lett 7 3891 1:CAS:528:DC%2BD2sXhtlaisb3P
- (2007) Nano Lett , vol.7 , pp. 3891
- Muthaswami, L.¹

122
- 58149263198
- 1:STN:280:DC%2BD1MzitlKqtg%3D%3D
- G Stan, et al. 2009 Nanotechnology 20 035706 1:STN:280: DC%2BD1MzitlKqtg%3D%3D
- (2009) Nanotechnology , vol.20 , pp. 035706
- Stan, G.¹

123
- 3142712966
- L Muthaswami RE Geer 2004 Appl Phys Lett 84 5082
- (2004) Appl Phys Lett , vol.84 , pp. 5082
- Muthaswami, L.¹ Geer, R.E.²

124
- 0036537214
- 1:CAS:528:DC%2BD38XisVeqsLg%3D
- RE Geer OV Kolosov GAD Briggs GS Shekhawat 2002 J Appl Phys 91 4549 1:CAS:528:DC%2BD38XisVeqsLg%3D
- (2002) J Appl Phys , vol.91 , pp. 4549
- Geer, R.E.¹ Kolosov, O.V.² Briggs, G.A.D.³ Shekhawat, G.S.⁴

125
- 53749102966
- 1:CAS:528:DC%2BD1cXht1KmsrjM
- D Passeri, et al. 2008 Superlattices Microstruct 44 641 1:CAS:528:DC%2BD1cXht1KmsrjM
- (2008) Superlattices Microstruct , vol.44 , pp. 641
- Passeri, D.¹

126
- 0029508857
- 1:CAS:528:DyaK2MXhtVSmtLbE
- M Chinmulgund RB Inturi JA Barnard 1995 Thin Solid Films 270 260 1:CAS:528:DyaK2MXhtVSmtLbE
- (1995) Thin Solid Films , vol.270 , pp. 260
- Chinmulgund, M.¹ Inturi, R.B.² Barnard, J.A.³

127
- 0032670867
- 1:CAS:528:DyaK1MXjs1ylur8%3D
- YY Lim MM Chaudhri Y Enomoto 1999 J Mater Res 14 2314 1:CAS:528:DyaK1MXjs1ylur8%3D
- (1999) J Mater Res , vol.14 , pp. 2314
- Lim, Y.Y.¹ Chaudhri, M.M.² Enomoto, Y.³

128
- 24144458892
- 1:CAS:528:DC%2BD2MXkvVSrsbw%3D
- M Muraoka 2005 Nanotechnology 16 542 1:CAS:528:DC%2BD2MXkvVSrsbw%3D
- (2005) Nanotechnology , vol.16 , pp. 542
- Muraoka, M.¹

129
- 1642361655
- 1:CAS:528:DC%2BD2cXhsVyktrY%3D
- DC Hurley JA Turner 2004 J Appl Phys 95 2403 1:CAS:528: DC%2BD2cXhsVyktrY%3D
- (2004) J Appl Phys , vol.95 , pp. 2403
- Hurley, D.C.¹ Turner, J.A.²

130
- 33750726058
- 1:CAS:528:DC%2BD28XhtFyqtbrK
- DC Hurley M Kopycinska-Müller D Julthongpiput MJ Fasolka 2006 Appl Surf Sci 253 1274 1:CAS:528:DC%2BD28XhtFyqtbrK
- (2006) Appl Surf Sci , vol.253 , pp. 1274
- Hurley, D.C.¹ Kopycinska-Müller, M.² Julthongpiput, D.³ Fasolka, M.J.⁴

131
- 33746038527
- DC Hurley M Kopycinska-Müller ED Langlois N Barbosa III 2006 Appl Phys Lett 89 021911
- (2006) Appl Phys Lett , vol.89 , pp. 021911
- Hurley, D.C.¹ Kopycinska-Müller, M.² Langlois, E.D.³ Barbosa Iii, N.⁴

132
- 3242723363
- 1:CAS:528:DC%2BD2cXlt1SktL4%3D
- AF Sarioglu A Atalar FL Degertekin 2004 Appl Phys Lett 84 5368 1:CAS:528:DC%2BD2cXlt1SktL4%3D
- (2004) Appl Phys Lett , vol.84 , pp. 5368
- Sarioglu, A.F.¹ Atalar, A.² Degertekin, F.L.³

133
- 45149124286
- Z Parlak FL Degertekin 2008 J Appl Phys 103 114910
- (2008) J Appl Phys , vol.103 , pp. 114910
- Parlak, Z.¹ Degertekin, F.L.²

134
- 79956014719
- 1:CAS:528:DC%2BD38XhtlSit78%3D
- AP McGuigan, et al. 2002 Appl Phys Lett 80 1180 1:CAS:528: DC%2BD38XhtlSit78%3D
- (2002) Appl Phys Lett , vol.80 , pp. 1180
- McGuigan, A.P.¹

135
- 0030080660
- 1:CAS:528:DyaK28XivVegsr8%3D
- K Yamanaka 1996 Thin Solid Films 273 116 1:CAS:528:DyaK28XivVegsr8%3D
- (1996) Thin Solid Films , vol.273 , pp. 116
- Yamanaka, K.¹

136
- 0035443571
- 1:CAS:528:DC%2BD3MXotlGlsLk%3D
- T Tsuji K Yamanaka 2001 Nanotechnology 12 301 1:CAS:528: DC%2BD3MXotlGlsLk%3D
- (2001) Nanotechnology , vol.12 , pp. 301
- Tsuji, T.¹ Yamanaka, K.²

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