Test structure for SPM tip shape deconvolution

Applied Physics A: Materials Science and Processing

Volumn 66, Issue 5, 1998, Pages 499-502

  Bykov, V ^a   Gologanov, A ^a   Shevyakov, V ^a  

^a NT MDT   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; IMAGE ANALYSIS; SCANNING; SILICON WAFERS;

SCANNING PROBE MICROSCOPES (SPM);

MICROSCOPES;

EID: 0032069243     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050703     Document Type: Article

References (17)

1. J.S. Villarrubia: J. Vac. Sci. Technol. B 14, 1518 (1996)
2. S. Heike, T. Hashizume, Y. Wada: J. Vac. Sci. Technol. B 14, 1522 (1996)
3. P. Grutter, W. Zimmerman-Edling, D. Brodbeck: Appl. Phys. Lett. 60, 2741 (1992)
4. U.D. Schwarz et al.: J. Microscopy 173, 183 (1994)
5. J.E. Griffith, D.A. Grigg: J. Appl. Phys. 74, 83 (1993)
6. S.S. Sheiko, M. Moller, E.M.C.M. Reuvekamp, H.W. Zandbergen: Phys. Rev. B 48, 5675 (1992)
7. US Patent N 5534359
8. European Patent Application N 0676614
9. J.E. Griffith, D.A. Grigg, M.J. Vasile, P.E. Russell, E.A. Fitzgerald: J. Vac. Sci. Technol. B 9, 3586 (1991)
10. D.A. Grigg, P. Erussell, J.E. Griffith, M.J. Vasile, E.A. Fitzgerald: Ultramicroscopy 42-44, 1616 (1992)
11. T.O. Glasbey et al.: Surf. Sci. Lett. 318, L1219 (1994)
12. C. Odin, J.P. Aime, Z. El Kaakour, T. Bouhacina: Surf. Sci. 317, 321 (1993)
13. A.A. Bukharaev, N.V. Berdunov, D.V. Ovchinnikov, N.I. Nurgazizov: International Symposium Nanostractures 96 (St. Petersburg, 24-28 June 1996) p. 380
14. J. Vesenka, S. Manne, T. March, J. Henderson: Biophysical J. 65, 1 (1993)
15. L. Hellemans, K. Waeyaert, F. Hennau, L. Stockman, I. Heyvaert, C. Van Haesendonck: J. Vac. Sci. Technol. B 9, 1309 (1991)
16. US Patent N 4968382
17. A. Boisen, O. Hansen, S. Bouwstra: J. Micromech. Microeng. 6, 58 (1996)