SCOPUS 정보 검색 플랫폼

Measurement Science and Technology

Volumn 12, Issue 9, 2001, Pages 1486-1494

Surface acoustic wave methods to determine the anisotropic elastic properties of thin films

(3) Hurley, D C a Tewary, V K a Richards, A J b

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b CSIRO (Australia)

Author keywords

Elastic properties; Laser ultrasonics; Surface acoustic waves; Thin films; Ultrasonic velocity

Indexed keywords

ACOUSTIC DISPERSION; ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVES; ANISOTROPY; ELASTICITY; FUSED SILICA; GREEN'S FUNCTION; SILICON WAFERS; SURFACE WAVES;

SURFACE ACOUSTIC WAVES (SAW);

THIN FILMS;

ACOUSTIC TECHNIQUE; ELASTIC PROPERTY; FILM;

EID: 0035447472 PISSN: 09570233 EISSN: None Source Type: Journal
DOI: 10.1088/0957-0233/12/9/315 Document Type: Article

Times cited : (64)

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