메뉴 건너뛰기




Volumn 48, Issue 3, 2003, Pages 125-164

Nanomechanical characterisation of solid surfaces and thin films

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; ELASTIC MODULI; FRACTURE TOUGHNESS; HARDNESS; INDENTATION; NANOSTRUCTURED MATERIALS; RESIDUAL STRESSES; STIFFNESS;

EID: 0041345927     PISSN: 09506608     EISSN: None     Source Type: Journal    
DOI: 10.1179/095066003225010227     Document Type: Review
Times cited : (369)

References (229)
  • 1
    • 0017919273 scopus 로고
    • 'Adhesion measurement of thin films, thick films, and bulk coatings', ed. K. L. Mittal, Philadelphia, PA, ASTM
    • AHN, J., MITTAL, K. L. and MACQUEEN, R. H. (1978): in 'Adhesion measurement of thin films, thick films, and bulk coatings', (ed. K. L. Mittal), STP 640, 134-157; Philadelphia, PA, ASTM.
    • (1978) STP , vol.640 , pp. 134-157
    • Ahn, J.1    Mittal, K.L.2    Macqueen, R.H.3
  • 5
    • 0004219012 scopus 로고
    • Standard test method for microhardness of materials
    • ASME
    • ASME (1979): 'Standard test method for microhardness of materials', ASME designation: E384-73, 359-379.
    • (1979) ASME Designation , vol.E384-73 , pp. 359-379
  • 7
    • 0041596903 scopus 로고
    • Thin films: Stresses and mechanical properties V
    • Pittsburgh, PA, Materials Research Society
    • BAKER, S. P., ROSS C. A., TOWNSEND, P. H., VOLKERT, C. A. and BØRGESEN, P. (eds.) (1994): 'Thin films: stresses and mechanical properties V', MRS Symp. Proc. 356; Pittsburgh, PA, Materials Research Society.
    • (1994) MRS Symp. Proc. , vol.356
    • Baker, S.P.1    Ross, C.A.2    Townsend, P.H.3    Volkert, C.A.4    Børgesen, P.5
  • 8
    • 24544431565 scopus 로고    scopus 로고
    • Fundamentals of nanoindentation and nanotribology II
    • Pittsburgh, PA, Materials Research Society
    • BAKER, S. P., COOK, R. F., CORCORAN, S. G. and MOODY, N. R. (eds.) (2000): 'Fundamentals of nanoindentation and nanotribology II', MRS Symp. Proc. 649; Pittsburgh, PA, Materials Research Society.
    • (2000) MRS Symp. Proc. , vol.649
    • Baker, S.P.1    Cook, R.F.2    Corcoran, S.G.3    Moody, N.R.4
  • 15
    • 85167946324 scopus 로고
    • 'Testing of metallic and inorganic coatings', ed. W. B. Harding and G. A. DiBari, Philadelphia, PA, ASTM
    • BHUSHAN, B. (1987): in 'Testing of metallic and inorganic coatings', (ed. W. B. Harding and G. A. DiBari). STP 947, 310-319; Philadelphia, PA, ASTM.
    • (1987) STP , vol.947 , pp. 310-319
    • Bhushan, B.1
  • 35
    • 0001780178 scopus 로고
    • Microindentation techniques in materials science and engineering
    • Philadelphia, PA, ASTM
    • BLAU, P. J. and LAWN, B. R. (eds.) (1986): 'Microindentation techniques in materials science and engineering', STP 889; Philadelphia, PA, ASTM.
    • (1986) STP , vol.889
    • Blau, P.J.1    Lawn, B.R.2
  • 40
    • 0042097833 scopus 로고
    • Thin films: Stresses and mechanical properties
    • Pittsburgh, PA, Materials Research Society
    • BRAVMAN, J. C., NIX, W. D., BARNETT, D. M. and SMITH, D. A. (eds.) (1989): 'Thin films: stresses and mechanical properties', MRS Symp. Proc. 130; Pittsburgh, PA, Materials Research Society.
    • (1989) MRS Symp. Proc. , vol.130
    • Bravman, J.C.1    Nix, W.D.2    Barnett, D.M.3    Smith, D.A.4
  • 49
    • 0043099796 scopus 로고    scopus 로고
    • Thin films: Stresses and mechanical properties VII
    • Pittsburgh, PA, Materials Research Society
    • CAMMARATA, R. C., NASTASI, M. A., BUSSO, F. P. and OLIVER, W. C. (eds.) (1997): 'Thin films: stresses and mechanical properties VII', MRS Symp. Proc. 505; Pittsburgh, PA, Materials Research Society.
    • (1997) MRS Symp. Proc. , vol.505
    • Cammarata, R.C.1    Nastasi, M.A.2    Busso, F.P.3    Oliver, W.C.4
  • 50
    • 0041596901 scopus 로고
    • ed. L. I. Maissel and R. Glang, chap. 12; New York, McGraw-Hill
    • CAMPBELL, D. S. (1970): in 'Handbook of thin film technology', (ed. L. I. Maissel and R. Glang), chap. 12; New York, McGraw-Hill.
    • (1970) Handbook of Thin Film Technology
    • Campbell, D.S.1
  • 62
    • 0027881154 scopus 로고
    • 'Thin films: stresses and mechanical properties IV', ed. P. H. Townsend et al., Pittsburgh, PA, Materials Research Society
    • DE BOER, M. P., HUANG, H., NELSON, J. C., JIANG, Z. P. and GERBERICH, W. W. (1993): in 'Thin films: stresses and mechanical properties IV', (ed. P. H. Townsend et al.), MRS Symp. Proc. 308, 647-652: Pittsburgh, PA, Materials Research Society.
    • (1993) MRS Symp. Proc. , vol.308 , pp. 647-652
    • De Boer, M.P.1    Huang, H.2    Nelson, J.C.3    Jiang, Z.P.4    Gerberich, W.W.5
  • 65
    • 0009276179 scopus 로고
    • Thin films: Stresses and mechanical properties II
    • Pittsburgh, PA, Materials Research Society
    • DOERNER, M. F., OLIVER, W. C., PHARR, G. M. and BROTZEN, F. R. (eds.) (1990): 'Thin films: stresses and mechanical properties II', MRS Symp. Proc. 188: Pittsburgh, PA, Materials Research Society.
    • (1990) MRS Symp. Proc. , vol.188
    • Doerner, M.F.1    Oliver, W.C.2    Pharr, G.M.3    Brotzen, F.R.4
  • 66
    • 0043099798 scopus 로고
    • Mechanical behavior of diamond and other forms of carbon
    • Pittsburgh, PA, Materials Research Society
    • DRORY, M. D., BOGY, D. B., DONLEY, M. S. and FIELD, J. E. (eds.) (1995): 'Mechanical behavior of diamond and other forms of carbon', MRS Symp. Proc. 383; Pittsburgh, PA, Materials Research Society.
    • (1995) MRS Symp. Proc. , vol.383
    • Drory, M.D.1    Bogy, D.B.2    Donley, M.S.3    Field, J.E.4
  • 73
    • 0041596869 scopus 로고    scopus 로고
    • Thin films: Stresses and mechanical properties VI
    • Pittsburgh, PA, Materials Research Society
    • GERBERICH, W. W., GAO, H., SUNDGREN, J.-E. and BAKER, S. V. (eds.) (1996): 'Thin films: stresses and mechanical properties VI', MRS Symp. Proc. 436: Pittsburgh, PA, Materials Research Society.
    • (1996) MRS Symp. Proc. , vol.436
    • Gerberich, W.W.1    Gao, H.2    Sundgren, J.-E.3    Baker, S.V.4
  • 84
    • 0022281417 scopus 로고
    • 'Electronic packaging materials science', ed. E. A. Giess et al., Pittsburgh. PA, Materials Research Society
    • HANNULA, S. P., STONE, D. and LI, C. Y. (1985): in 'Electronic packaging materials science', (ed. E. A. Giess et al.), MRS Symp. Proc. 40, 217-224: Pittsburgh. PA, Materials Research Society.
    • (1985) MRS Symp. Proc. , vol.40 , pp. 217-224
    • Hannula, S.P.1    Stone, D.2    Li, C.Y.3
  • 85
    • 0022581153 scopus 로고
    • 'The use of small-scale specimens for testing irradiated material', ed. W. R. Corwin and G. E. Lucas, Philadelphia, PA, ASTM
    • HANNULA, S. P., WANAGEL, J. and LI, C. Y. (1986): in 'The use of small-scale specimens for testing irradiated material', (ed. W. R. Corwin and G. E. Lucas), STP 888, 233-251: Philadelphia, PA, ASTM.
    • (1986) STP , vol.888 , pp. 233-251
    • Hannula, S.P.1    Wanagel, J.2    Li, C.Y.3
  • 93
    • 0004254886 scopus 로고
    • Properties of silicon
    • INSPEC, The Institution of Electrical Engineers, London
    • INSPEC (1988): 'Properties of silicon', EMIS Data Reviews Series no. 4, INSPEC, The Institution of Electrical Engineers, London.
    • (1988) EMIS Data Reviews Series , vol.4
  • 95
    • 85040875608 scopus 로고
    • Cambridge, Cambridge University Press
    • JOHNSON, K. L. (1985): 'Contact mechanics'; Cambridge, Cambridge University Press.
    • (1985) Contact Mechanics
    • Johnson, K.L.1
  • 100
    • 84976119548 scopus 로고
    • 'Thin films: stresses and mechanical properties II', ed. M. F. Doerner et al., Pittsburgh, PA, Materials Research Society
    • LAFONTAINE, W. R., YOST, B., BLACK, R. D. and LI, C. (1990a): in 'Thin films: stresses and mechanical properties II', (ed. M. F. Doerner et al.), MRS Symp. Proc. 188, 165-170: Pittsburgh, PA, Materials Research Society.
    • (1990) MRS Symp. Proc. , vol.188 , pp. 165-170
    • Lafontaine, W.R.1    Yost, B.2    Black, R.D.3    Li, C.4
  • 118
    • 0032172789 scopus 로고    scopus 로고
    • LI, X. and BHUSHAN, B. (1998b): Wear, 220, 51-58.
    • (1998) Wear , vol.220 , pp. 51-58
    • Li, X.1    Bhushan, B.2
  • 135
    • 0001634708 scopus 로고
    • 'Thin films: stresses and mechanical properties III', W. D. Nix et al., Pittsburgh, PA, Materials Research Society
    • rffrt LUCAS, B. N. and OLIVER, W. C. (1992): in 'Thin films: stresses and mechanical properties III', (W. D. Nix et al.), MRS Symp. Proc. 239, 337-341; Pittsburgh, PA, Materials Research Society.
    • (1992) MRS Symp. Proc. , vol.239 , pp. 337-341
    • Lucas, B.N.1    Oliver, W.C.2
  • 144
    • 0042598884 scopus 로고
    • 'Thin films: Stresses and mechanical properties II', ed. M. F. Doerner et al., Pittsburgh, PA, Materials Research Society
    • MCHARGUE, C. J., O'HERN, M. E. and JOSLIN, D. L. (1990): in 'Thin films: stresses and mechanical properties II', (ed. M. F. Doerner et al.), MRS Symp. Proc. 188, 111-120; Pittsburgh, PA, Materials Research Society.
    • (1990) MRS Symp. Proc. , vol.188 , pp. 111-120
    • McHargue, C.J.1    O'Hern, M.E.2    Joslin, D.L.3
  • 147
    • 0003576482 scopus 로고
    • Adhesion measurement of thin films, thick films, and bulk coatings
    • Philadelphia, PA, ASTM
    • MITTAL, K. L. (ed.) (1978): 'Adhesion measurement of thin films. thick films, and bulk coatings', STP 640: Philadelphia, PA, ASTM.
    • (1978) STP , vol.640
    • Mittal, K.L.1
  • 148
    • 0003348526 scopus 로고    scopus 로고
    • Fundamentals of nanoindentation and nanotribology
    • Pittsburgh, PA, Materials Research Society
    • MOODY, N. R., GERBERICH, W. W., BURNHAM, N. and BAKER, S. P. (eds.) (1998): 'Fundamentals of nanoindentation and nanotribology', MRS Symp. Proc. 522; Pittsburgh, PA, Materials Research Society.
    • (1998) MRS Symp. Proc. , vol.522
    • Moody, N.R.1    Gerberich, W.W.2    Burnham, N.3    Baker, S.P.4
  • 150
    • 0042097785 scopus 로고    scopus 로고
    • MTS Nano Instruments Innovation Center, Oak Ridge, TN
    • MTS (2001): 'Customer care kit: the Nano Indenter XP', MTS Nano Instruments Innovation Center, Oak Ridge, TN (www.mts.com/nano/).
    • (2001) Customer Care Kit: The Nano Indenter XP
  • 156
    • 0042598882 scopus 로고
    • Thin films: Stresses and mechanical properties III
    • Pittsburgh, PA, Materials Research Society
    • NIX, W. D., BRAVMAN, J. C., ARZT, E. and FREUND, L. B. (eds.) (1992): 'Thin films: stresses and mechanical properties III', MRS Symp. Proc. 239: Pittsburgh, PA, Materials Research Society.
    • (1992) MRS Symp. Proc. , vol.239
    • Nix, W.D.1    Bravman, J.C.2    Arzt, E.3    Freund, L.B.4
  • 162
    • 0000849603 scopus 로고
    • 'Microindentation techniques in materials science and engineering', ed. by P. J. Blau and B. R. Lawn, Philadelphia, PA, ASTM
    • OLIVER, W. C., HUTCHINGS, R. and PETHICA, J. B. (1986): in 'Microindentation techniques in materials science and engineering', (ed. by P. J. Blau and B. R. Lawn), STP 889, 90-108: Philadelphia, PA, ASTM.
    • (1986) STP , vol.889 , pp. 90-108
    • Oliver, W.C.1    Hutchings, R.2    Pethica, J.B.3
  • 164
    • 0043099751 scopus 로고    scopus 로고
    • Thin films: Stresses and mechanical properties IX
    • Pittsburgh, PA, Materials Research Society
    • OZKAN, C. S., CAMMARATA, R. C., FREUND, L. B. and GAO, H. (eds.) (2001): 'Thin films: stresses and mechanical properties IX', MRS Symp. Proc. 695; Pittsburgh, PA, Materials Research Society.
    • (2001) MRS Symp. Proc. , vol.695
    • Ozkan, C.S.1    Cammarata, R.C.2    Freund, L.B.3    Gao, H.4
  • 170
    • 0002361295 scopus 로고
    • 'Thin films: stresses and mechanical properties', ed. J. C. Bravman et al., Pittsburgh, PA, Materials Research Society
    • PETHICA, J. B. and OLIVER, W. C. (1989): in 'Thin films: stresses and mechanical properties', (ed. J. C. Bravman et al.), MRS Symp. Proc. 130, 13-23; Pittsburgh, PA, Materials Research Society.
    • (1989) MRS Symp. Proc. , vol.130 , pp. 13-23
    • Pethica, J.B.1    Oliver, W.C.2
  • 173
    • 0001818087 scopus 로고
    • 'Thin film: stresses and mechanical properties III', ed. W. D. Nix et al., Pittsburgh, PA, Materials Research Society
    • PHARR, G. M. (1992): in 'Thin film: stresses and mechanical properties III', (ed. W. D. Nix et al.), MRS Symp. Proc. 239, 301-312: Pittsburgh, PA, Materials Research Society.
    • (1992) MRS Symp. Proc. , vol.239 , pp. 301-312
    • Pharr, G.M.1
  • 183
    • 0000849603 scopus 로고
    • 'Microindentation techniques in materials science and engineering', ed. P. J. Blau and B. R. Lawn, Philadelphia, PA, ASTM
    • SARGENT, P. M. (1986): in 'Microindentation techniques in materials science and engineering', (ed. P. J. Blau and B. R. Lawn), STP 889, 160-174; Philadelphia, PA, ASTM.
    • (1986) STP , vol.889 , pp. 160-174
    • Sargent, P.M.1
  • 191
    • 0041596861 scopus 로고
    • Cambridge, Cambridge University Press
    • SURESH, S. (1991): 'Fatige of materials': Cambridge, Cambridge University Press.
    • (1991) Fatige of Materials
    • Suresh, S.1
  • 195
    • 0009810996 scopus 로고    scopus 로고
    • 'Thin films: stresses and mechanical properties VI', ed. W. W. Gerberich et al., Pittsburgh, PA, Materials Research Society
    • SYED ASIF, S. A. and PETHICA, J. B. (1997): in 'Thin films: stresses and mechanical properties VI', (ed. W. W. Gerberich et al). MRS Symp. Proc. 436, 201-206; Pittsburgh, PA, Materials Research Society.
    • (1997) MRS Symp. Proc. , vol.436 , pp. 201-206
    • Syed Asif, S.A.1    Pethica, J.B.2
  • 200
    • 0027873257 scopus 로고
    • Thin films: Stresses and mechanical properties IV
    • Pittsburgh, PA, Materials Research Society
    • TOWNSEND, P. H., WEIHS, T. P., SANCHEZ, J. E. and BORGESEN, P. (eds.) (1993): 'Thin films: stresses and mechanical properties IV', MRS Symp. Proc. 308; Pittsburgh, PA, Materials Research Society.
    • (1993) MRS Symp. Proc. , vol.308
    • Townsend, P.H.1    Weihs, T.P.2    Sanchez, J.E.3    Borgesen, P.4
  • 209
    • 0042598880 scopus 로고    scopus 로고
    • Thin films: Stresses and mechanical properties VIII
    • Pittsburgh, PA, Materials Research Society
    • VINCI, R., KRAFT, O., MOODY, N., BESSER, P. and SHAFFER, E. (eds.) (1999): 'Thin films: stresses and mechanical properties VIII', MRS Symp. Proc. 594: Pittsburgh, PA, Materials Research Society.
    • (1999) MRS Symp. Proc. , vol.594
    • Vinci, R.1    Kraft, O.2    Moody, N.3    Besser, P.4    Shaffer, E.5
  • 210
    • 0343074657 scopus 로고
    • 'Microindentation techniques in materials science and engineering', ed. P. J. Blau and B. R. Lawn, Philadelphia, PA, ASTM
    • VITOVEC, F. H. (1986): in 'Microindentation techniques in materials science and engineering', (ed. P. J. Blau and B. R. Lawn), STP 889, 175-185; Philadelphia, PA, ASTM.
    • (1986) STP , vol.889 , pp. 175-185
    • Vitovec, F.H.1
  • 216
    • 0000375153 scopus 로고
    • 'Thin films: stresses and mechanical properties III', ed. W. D. Nix et al., Pittsburgh, PA, Materials Research Society
    • WEIHS, T. P., LAWRENCE, C. W., DERBY, C. B. and PETHICA, J. B. (1992): in 'Thin films: stresses and mechanical properties III', (ed. W. D. Nix et al.), MRS Symp. Proc. 239, 361-370; Pittsburgh, PA, Materials Research Society.
    • (1992) MRS Symp. Proc. , vol.239 , pp. 361-370
    • Weihs, T.P.1    Lawrence, C.W.2    Derby, C.B.3    Pethica, J.B.4
  • 219
    • 0027881142 scopus 로고
    • 'Thin films: stresses and mechanical properties IV, ed. P. H. Townsend et al., Pittsburgh, PA, Materials Research Society
    • WHITE, R. L., NELSON, J. and GERBERICH, W. W. (1993): in 'Thin films: stresses and mechanical properties IV, (ed. P. H. Townsend et al.), MRS Symp. Proc. 308, 141-146: Pittsburgh, PA, Materials Research Society.
    • (1993) MRS Symp. Proc. , vol.308 , pp. 141-146
    • White, R.L.1    Nelson, J.2    Gerberich, W.W.3
  • 222
    • 0042097783 scopus 로고
    • ed. B. Bhushan and N. S. Eiss, SP-21; Park Ridge, IL, American Society of Lubrication Engineers
    • WIFRENGA, P. E. and VAN DER LINDEN, J. H. M. (1986): in 'Tribology and mechanics of magnetic storage systems', (ed. B. Bhushan and N. S. Eiss), Vol. 3, 31-37, SP-21; Park Ridge, IL, American Society of Lubrication Engineers.
    • (1986) Tribology and Mechanics of Magnetic Storage Systems , vol.3 , pp. 31-37
    • Wifrenga, P.E.1    Van der Linden, J.H.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.