Local indentation modulus characterization of diamondlike carbon films by atomic force acoustic microscopy two contact resonance frequencies imaging technique

Applied Physics Letters

Volumn 88, Issue 12, 2006, Pages

  Passeri, D ^a   Bettucci, A ^a   Germano, M ^a   Rossi, M ^a   Alippi, A ^a   Sessa, V ^b   Fiori, A ^b   Tamburri, E ^b   Terranova, M L ^b  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

^b UNIVERSITY OF ROME TOR VERGATA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; ATOMIC FORCE MICROSCOPY; IMAGING TECHNIQUES; LASER ABLATION; MOLYBDENUM; NUMERICAL METHODS; RESONANCE;

ACOUSTIC IMAGES; ATOMIC FORCE ACOUSTIC MICROSCOPY; GLASSY CARBON TARGETS; MOLYBDENUM FOILS;

DIAMOND LIKE CARBON FILMS;

EID: 33645522265     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2188376     Document Type: Article

References (22)

1. S. Aisenberg and R. Chabot, Appl. Phys. Lett. 42, 2953 (1971).
2. H. O. Pierson, Handbook of Carbon, Graphite, Diamond, and Fullerenes (Noyes, Park Ridge, New Jersey, 1993).
3. Q. Wei, R. J. Narayan, A. K. Sharma, J. Sankar, and J. Narayan, J. Vac. Sci. Technol. A 17, 3406 (1999).
4. N. Savvides and T. J. Bell, J. Appl. Phys. 72, 2791 (1992).
5. S. Hoshino, K. Fujii, N. Shohata, H. Yamaguchi, Y. Tsukamoto, and M. Yanagisawa, J. Appl. Phys. 65, 1918 (1988).
6. S. Amelio, A. V. Goldade, U. Rabe, V. Scherer, B. Bhushan, and W. Arnold, Thin Solid Films 392, 75 (2001).
7. S. J. Cho, K. R. Lee, J. H. Eun, K. Y. Jeong, and D. Kwon, Diamond Relat. Mater. 8, 1067 (1999).
8. D. Schneider and M. D. Tucker, Thin Solid Films 290, 305 (1996).
9. H. L. Chan, U. Ekanayake, A. Kumar, M. R. Alam, Q. You, R. B. Inturi, N. Shu, and J. A. Barnard, Appl. Surf. Sci. 109, 58 (1997).
10. L. S. Fan, Y. C. Tai, and R. S. Muller, IEEE Trans. Electron Devices 35, 724 (1988).
11. U. Rabe, J. Janser, and W. Arnold, Rev. Sci. Instrum. 67, 3281 (1996).
12. U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, Ultrasonics 38, 430 (2000).
13. D. C. Hurley, K. Shen, N. M. Jennett, and J. A. Turner, J. Appl. Phys. 94, 2347 (2003).
14. D. Passeri, A. Bettucci, M. Germano, M. Rossi, A. Alippi, S. Orlanducci, M. L. Terranova, and M. Ciavarella, Rev. Sci. Instrum. 76, 093 904 (2005).
15. F. Dinelli, S. K. Biswas, G. A. D. Briggs, and O. Kolosov, Phys. Rev. B 61, 13 995 (2000).
16. L. Muthuswami and R. E. Geer, Appl. Phys. Lett. 84, 5082 (2004).
17. J. Shin, B. J. Rodriguez, A. P. Baddorf, T. Thundat, E. Karapetian, M. Kachanov, A. Gruverman, and S. V. Kalinin, J. Vac. Sci. Technol. B 23, 2102 (2005).
18. M. Rossi, G. Gabrielli, T. Papa, S. Piccirillo, V. Sessa, M. L. Terranova, S. Valeri, and M. Materassi, Surf. Coat. Technol. 139, 87 (2001).
19. J. E. Sader, J. W. M. Chon, and P. Mulvaney, Rev. Sci. Instrum. 70, 3967 (1999).
20. M. Muraoka, Nanotechnology 16, 542 (2005).
21. N. A. Burnham, D. Dawn, D. Dominguez, R. L. Mowery, and R. J. Colton, Phys. Rev. Lett. 64, 1931 (1990).
22. P. E. Mazeran and J. L. Loubet, Tribol. Lett. 3, 125 (1997).