Evaluation of elastic properties of submicrometer thin films using slanted finger interdigital transducers

Journal of Applied Physics

Volumn 97, Issue 7, 2005, Pages

  Wu, Tsung Tsong ^a   Chen, Yung Yu ^a   Huang, Guo Tsai ^a   Chang, Pei Zen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC PROPERTIES; SLANTED FINGER INTERDIGITAL TRANSDUCERS (SFIT); SUBMICROMETER THICKNESS; SUBMICROMETER THIN FILMS;

ACOUSTIC SURFACE WAVE DEVICES; ALGORITHMS; ELASTICITY; ELECTRONICS INDUSTRY; FREQUENCY RESPONSE; LITHIUM NIOBATE; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; NONDESTRUCTIVE EXAMINATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TRANSDUCERS;

THIN FILMS;

EID: 17444393211     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1865319     Document Type: Article

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