Local indentation modulus characterization via two contact resonance frequencies atomic force acoustic microscopy

Microelectronic Engineering

Volumn 84, Issue 3, 2007, Pages 490-494

  Passeri, D ^a   Bettucci, A ^a   Germano, M ^a   Rossi, M ^a   Alippi, A ^a   Fiori, A ^b   Tamburri, E ^b   Orlanducci, S ^b   Terranova, M L ^b   Vlassak, J J ^c  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

^b UNIVERSITY OF ROME TOR VERGATA   (Italy)

^c HARVARD UNIVERSITY   (United States)

Author keywords

Atomic force acoustic microscopy; Elastic properties imaging; Indentation modulus measurement

Indexed keywords

ELASTIC MODULI; NONDESTRUCTIVE EXAMINATION; PIEZOELECTRIC TRANSDUCERS; RESONANCE;

CONTACT RESONANCE FREQUENCIES; ELASTIC PROPERTIES IMAGING; INDENTATION MODULUS MEASUREMENTS;

ATOMIC FORCE MICROSCOPY;

EID: 33846904030     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.069     Document Type: Article

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