Humidity effects on the determination of elastic properties by atomic force acoustic microscopy

Journal of Applied Physics

Volumn 95, Issue 5, 2004, Pages 2403-2407

  Hurley, D C ^a   Turner, J A ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE ACOUSTIC MICROSCOPY (AFAM); INDENTATION MODULUS;

ACOUSTIC MICROSCOPES; ATMOSPHERIC HUMIDITY; ATOMIC FORCE MICROSCOPY; BOROSILICATE GLASS; DAMPING; DATA REDUCTION; ELASTIC MODULI; INDENTATION; MATHEMATICAL MODELS; NATURAL FREQUENCIES; SCANNING ELECTRON MICROSCOPY; STIFFNESS; THIN FILMS;

VISCOELASTICITY;

EID: 1642361655     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1646436     Document Type: Article

References (13)

1. U. Rabe, M. Kopycinska, S. Hirsekorn, J. M. Saldana, G. A. Schneider, and W. Arnold, J. Phys. D 35, 2621 (2002).
2. D. C. Hurley, K. Shen, N. M. Jennett, and J. A. Turner, J. Appl. Phys. 94, 2347 (2003).
3. T. Tsuji and K. Yamanaka, Nanotechnology 12, 301 (2001).
4. R. E. Geer, O. V. Kolosov, G. A. D. Briggs, and G. S. Shekhawat, J. Appl. Phys. 91, 4549 (2002).
5. U. Rabe, S. Amelio, M. Kopycinska, S. Hirsekorn, M. Kempf, M. Göken, and W. Arnold, Surf. Interface Anal. 33, 65 (2002).
6. M. G. Shapiro, S. V. Nguyen, T. Matsuda, and D. Dobuzinsky, Thin Solid Films 270, 503 (1995).
7. Material trade names are identified to foster understanding. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
8. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992).
9. U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, Ultrasonics 38, 430 (2000).
10. U. Rabe, J. A. Turner, and W. Arnold, Appl. Phys. A: Mater. Sci. Process. 66, S277 (1998).
11. M. Yoshimaru, S. Koizumi, and K. Shimokawa, J. Vac. Sci. Technol. A 15, 2915 (1997).
12. S. P. Kim, S. K. Choi, Y. Park, and I. Chung, Appl. Phys. Lett. 79, 185 (2001).
13. F. Dinelli, S. K. Biswas, G. A. D. Briggs, and O. V. Kolosov, Phys. Rev. B 61, 13995 (2000).