Accurate determination of the mechanical properties of thin aluminum films deposited on sapphire flats using nanoindentations

Journal of Materials Research

Volumn 14, Issue 6, 1999, Pages 2314-2327

  Lim, Y Y ^a   Chaudhri, M M ^a   Enomoto, Y ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; ELASTIC MODULI; HARDNESS; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; METALLIC FILMS; RESIDUAL STRESSES;

BERKOVICH DIAMOND INDENTER; LOAD DISPLACEMENT CURVES; NANOINDENTATIONS;

ALUMINUM;

EID: 0032670867     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0308     Document Type: Article

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