메뉴 건너뛰기




Volumn 57, Issue 2, 2010, Pages 437-447

Process-variation effect, metal-gate work-function fluctuation, and random-dopant fluctuation in emerging CMOS technologies

Author keywords

Circuit; Coupled device circuit simulation; Emerging device technology; Intrinsic parameter fluctuation; Modeling and simulation; Nanoscale MOSFET; Power fluctuation

Indexed keywords

CIRCUIT; COUPLED DEVICES; DEVICE TECHNOLOGIES; MODELING AND SIMULATION; NANOSCALE MOSFETS; PARAMETER FLUCTUATIONS; POWER FLUCTUATIONS;

EID: 76349126341     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2009.2036309     Document Type: Article
Times cited : (113)

References (61)
  • 1
    • 0042532317 scopus 로고    scopus 로고
    • Intrinsic parameter fluctuations in decananometer MOSFETs introduced by gate line edge roughness
    • May
    • A. Asenov, S. Kaya, and A. R. Brown, "Intrinsic parameter fluctuations in decananometer MOSFETs introduced by gate line edge roughness," IEEE Trans. Electron Devices, vol.50, no.5, pp. 1254-1260, May 2003.
    • (2003) IEEE Trans. Electron Devices , vol.50 , Issue.5 , pp. 1254-1260
    • Asenov, A.1    Kaya, S.2    Brown, A.R.3
  • 2
    • 33947265310 scopus 로고    scopus 로고
    • Simulation study of individual and combined sources of intrinsic parameter fluctuations in conventional nano-MOSFETs
    • Dec.
    • G. Roy, A. R. Brown, F. Adamu-Lema, S. Roy, and A. Asenov, "Simulation study of individual and combined sources of intrinsic parameter fluctuations in conventional nano-MOSFETs," IEEE Trans. Electron Devices, vol.53, no.12, pp. 3063-3070, Dec. 2006.
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.12 , pp. 3063-3070
    • Roy, G.1    Brown, A.R.2    Adamu-Lema, F.3    Roy, S.4    Asenov, A.5
  • 3
    • 84886448106 scopus 로고    scopus 로고
    • Effects of gate depletion and boron penetration on matching of deep submicron CMOS transistor
    • H. P. Tuinhout, A. H.Montree, J. Schmitz, and P. A. Stolk, "Effects of gate depletion and boron penetration on matching of deep submicron CMOS transistor," in IEDM Tech. Dig., 1997, pp. 631-634.
    • (1997) IEDM Tech. Dig. , pp. 631-634
    • Tuinhout, H.P.1    Montree, A.H.2    Schmitz, J.3    Stolk, P.A.4
  • 4
    • 36248947996 scopus 로고    scopus 로고
    • Poly-Si-gate-related variability in decananometre MOSFETs with conventional architecture
    • Nov.
    • A. R. Brown, G. Roy, and A. Asenov, "Poly-Si-gate-related variability in decananometre MOSFETs with conventional architecture," IEEE Trans. Electron Devices, vol.54, no.11, pp. 3056-3063, Nov. 2007.
    • (2007) IEEE Trans. Electron Devices , vol.54 , Issue.11 , pp. 3056-3063
    • Brown, A.R.1    Roy, G.2    Asenov, A.3
  • 5
    • 0016572578 scopus 로고
    • Effect of randomness in distribution of impurity atoms on FET thresholds
    • Nov.
    • R. W. Keyes, "Effect of randomness in distribution of impurity atoms on FET thresholds," Appl. Phys., vol.8, no.3, pp. 251-259, Nov. 1975.
    • (1975) Appl. Phys. , vol.8 , Issue.3 , pp. 251-259
    • Keyes, R.W.1
  • 6
    • 0000923313 scopus 로고
    • Effect of multi-ion screening on the electronic transport in doped semiconductors: A molecular-dynamics analysis
    • Apr.
    • R. P. Joshi and D. K. Ferry, "Effect of multi-ion screening on the electronic transport in doped semiconductors: A molecular-dynamics analysis," Phys. Rev. B, Condens. Matter, vol.43, no.12, pp. 9734-9739, Apr. 1991.
    • (1991) Phys. Rev. B, Condens. Matter , vol.43 , Issue.12 , pp. 9734-9739
    • Joshi, R.P.1    Ferry, D.K.2
  • 7
    • 0028427763 scopus 로고
    • Modeling of ultrathin double-gate NMOS/SOI transistors
    • May
    • P. Francis, A. Terao, and D. Flandre, "Modeling of ultrathin double-gate NMOS/SOI transistors," IEEE Trans. Electron Devices, vol.41, no.5, pp. 715-720, May 1994.
    • (1994) IEEE Trans. Electron Devices , vol.41 , Issue.5 , pp. 715-720
    • Francis, P.1    Terao, A.2    Flandre, D.3
  • 8
    • 0029326694 scopus 로고
    • 3D simulation of deep-submicron devices: How impurity atoms affect conductance
    • Jun.
    • J.-R. Zhou and D. K. Ferry, "3D simulation of deep-submicron devices: How impurity atoms affect conductance," IEEE Comput. Sci. Eng., vol.2, no.2, pp. 30-37, Jun. 1995.
    • (1995) IEEE Comput. Sci. Eng. , vol.2 , Issue.2 , pp. 30-37
    • Zhou, J.-R.1    Ferry, D.K.2
  • 9
    • 0031365880 scopus 로고    scopus 로고
    • Intrinsic MOSFET parameter fluctuations due to random dopant placement
    • Dec.
    • X.-H. Tang, V. K. De, and J. D. Meindl, "Intrinsic MOSFET parameter fluctuations due to random dopant placement," IEEE Trans. Very Large Scale Integr.(VLSI) Syst., vol.5, no.4, pp. 369-376, Dec. 1997.
    • (1997) IEEE Trans. Very Large Scale Integr.(VLSI) Syst. , vol.5 , Issue.4 , pp. 369-376
    • Tang, X.-H.1    De, V.K.2    Meindl, J.D.3
  • 10
    • 0000115765 scopus 로고    scopus 로고
    • A 0.1-μm delta doped MOSFET fabricated with post-low-energy implanting selective epitaxy
    • Apr.
    • K. Noda, T. Tatsumi, T. Uchida, K. Nakajima, H. Miyamoto, and C. Hu, "A 0.1-μm delta doped MOSFET fabricated with post-low-energy implanting selective epitaxy," IEEE Trans. Electron Devices, vol.45, no.4, pp. 809-813, Apr. 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , Issue.4 , pp. 809-813
    • Noda, K.1    Tatsumi, T.2    Uchida, T.3    Nakajima, K.4    Miyamoto, H.5    Hu, C.6
  • 11
    • 0032164821 scopus 로고    scopus 로고
    • Modeling statistical dopant fluctuations in MOS transistors
    • Sep.
    • P. A. Stolk, F. P. Widdershoven, and D. B. M. Klaassen, "Modeling statistical dopant fluctuations in MOS transistors," IEEE Trans. Electron Devices, vol.45, no.9, pp. 1960-1971, Sep. 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , Issue.9 , pp. 1960-1971
    • Stolk, P.A.1    Widdershoven, F.P.2    Klaassen, D.B.M.3
  • 12
    • 85031637284 scopus 로고    scopus 로고
    • Modeling of deepsubmicrometer MOSFETs: Random impurity effects, threshold voltage shifts and gate capacitance attenuation
    • Oct.
    • D. Vasileska, W. J. Gross, and D. K. Ferry, "Modeling of deepsubmicrometer MOSFETs: Random impurity effects, threshold voltage shifts and gate capacitance attenuation," in Proc. Ext. Abstr. Int. Workshop Comput. Electron., Oct. 1998, pp. 259-262.
    • (1998) Proc. Ext. Abstr. Int. Workshop Comput. Electron. , pp. 259-262
    • Vasileska, D.1    Gross, W.J.2    Ferry, D.K.3
  • 13
    • 0032595866 scopus 로고    scopus 로고
    • A novel approach for introducing the electron-electron and electron-impurity interactions in particle-based simulations
    • Sep.
    • W. J. Gross, D. Vasileska, and D. K. Ferry, "A novel approach for introducing the electron-electron and electron-impurity interactions in particle-based simulations," IEEE Electron Device Lett., vol.20, no.9, pp. 463-465, Sep. 1999.
    • (1999) IEEE Electron Device Lett. , vol.20 , Issue.9 , pp. 463-465
    • Gross, W.J.1    Vasileska, D.2    Ferry, D.K.3
  • 14
    • 0032157146 scopus 로고    scopus 로고
    • Discrete random dopant distribution effects in nanometer-scale MOSFETs
    • Sep.
    • H.-S. Wong, Y. Taur, and D. J. Frank, "Discrete random dopant distribution effects in nanometer-scale MOSFETs," Microelectron. Reliab., vol.38, no.9, pp. 1447-1456, Sep. 1999.
    • (1999) Microelectron. Reliab. , vol.38 , Issue.9 , pp. 1447-1456
    • Wong, H.-S.1    Taur, Y.2    Frank, D.J.3
  • 15
    • 0034452588 scopus 로고    scopus 로고
    • Role of longrange and short-range Coulomb potentials in threshold characteristics under discrete dopants in sub-0.1 μm Si-MOSFETs
    • Dec.
    • N. Sano, K. Matsuzawa, M. Mukai, and N. Nakayama, "Role of longrange and short-range Coulomb potentials in threshold characteristics under discrete dopants in sub-0.1 μm Si-MOSFETs," in IEDM Tech. Dig., Dec. 2000, pp. 275-278.
    • (2000) IEDM Tech. Dig. , pp. 275-278
    • Sano, N.1    Matsuzawa, K.2    Mukai, M.3    Nakayama, N.4
  • 16
    • 0036473348 scopus 로고    scopus 로고
    • On discrete random dopant modeling in drift-diffusion simulations: Physical meaning of 'atomistic' dopants
    • Feb.
    • N. Sano, K. Matsuzawa, M. Mukai, and N. Nakayama, "On discrete random dopant modeling in drift-diffusion simulations: Physical meaning of 'atomistic' dopants," Microelectron. Reliab., vol.42, no.2, pp. 189-199, Feb. 2002.
    • (2002) Microelectron. Reliab. , vol.42 , Issue.2 , pp. 189-199
    • Sano, N.1    Matsuzawa, K.2    Mukai, M.3    Nakayama, N.4
  • 17
    • 2442484819 scopus 로고    scopus 로고
    • Effect of discrete impurities on electron transport in ultrashort MOSFET using 3D MC simulation
    • May
    • P. Dollfus, A. Bournel, S. Galdin, S. Barraud, and P. Hesto, "Effect of discrete impurities on electron transport in ultrashort MOSFET using 3D MC simulation," IEEE Trans. Electron Devices, vol.51, no.5, pp. 749-756, May 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.5 , pp. 749-756
    • Dollfus, P.1    Bournel, A.2    Galdin, S.3    Barraud, S.4    Hesto, P.5
  • 18
    • 33749022999 scopus 로고    scopus 로고
    • Comparison of random-dopant-induced threshold voltage fluctuation in nanoscale single-, double-, and surrounding-gate field-effect transistors
    • Sep.
    • Y. Li and S.-M. Yu, "Comparison of random-dopant-induced threshold voltage fluctuation in nanoscale single-, double-, and surrounding-gate field-effect transistors," Jpn. J. Appl. Phys., vol. 45, no. 9A, pp. 6860-6865, Sep. 2006.
    • (2006) Jpn. J. Appl. Phys. , vol.45 A , Issue.9 , pp. 6860-6865
    • Li, Y.1    Yu, S.-M.2
  • 19
    • 34547781729 scopus 로고    scopus 로고
    • Impact of parameter variations and random dopant fluctuations on short-channel fully depleted SOI MOSFETs with extremely thin BOX
    • Aug.
    • T. Ohtou, N. Sugii, and T. Hiramoto, "Impact of parameter variations and random dopant fluctuations on short-channel fully depleted SOI MOSFETs with extremely thin BOX," IEEE Electron Device Lett., vol.28, no.8, pp. 740-742, Aug. 2007.
    • (2007) IEEE Electron Device Lett. , vol.28 , Issue.8 , pp. 740-742
    • Ohtou, T.1    Sugii, N.2    Hiramoto, T.3
  • 20
    • 52649096841 scopus 로고    scopus 로고
    • Discrete-dopant-induced characteristic fluctuations in 16 nm multiple-gate silicon-on-insulator devices
    • Oct.
    • Y. Li and C.-H. Hwang, "Discrete-dopant-induced characteristic fluctuations in 16 nm multiple-gate silicon-on-insulator devices," J. Appl. Phy., vol.102, no.8, p. 084509, Oct. 2007.
    • (2007) J. Appl. Phy. , vol.102 , Issue.8 , pp. 084509
    • Li, Y.1    Hwang, C.-H.2
  • 21
    • 52649130153 scopus 로고    scopus 로고
    • A coupled-simulation-and-optimization approach to nanodevice fabrication with minimization of electrical characteristics fluctuation
    • Nov.
    • Y. Li and S.-M. Yu, "A coupled-simulation-and-optimization approach to nanodevice fabrication with minimization of electrical characteristics fluctuation," IEEE Trans. Semicond. Manuf., vol.20, no.4, pp. 432-438, Nov. 2007.
    • (2007) IEEE Trans. Semicond. Manuf. , vol.20 , Issue.4 , pp. 432-438
    • Li, Y.1    Yu, S.-M.2
  • 22
    • 0035474343 scopus 로고    scopus 로고
    • Random dopant model for three-dimensional drift-diffusion simulations in metal-oxide-semiconductor field-effecttransistors
    • N. Sano andM. Tomizawa, "Random dopant model for three-dimensional drift-diffusion simulations in metal-oxide-semiconductor field- effecttransistors," Appl. Phy. Lett., vol.79, no.14, p. 2267, 2007.
    • (2007) Appl. Phy. Lett. , vol.79 , Issue.14 , pp. 2267
    • Sano, N.1    Tomizawa, M.2
  • 23
    • 44949159936 scopus 로고    scopus 로고
    • Discrete dopant fluctuated 20 nm/15 nm-gate planar CMOS
    • Jun.
    • Y. Li, S.-M. Yu, J.-R. Hwang, and F.-L. Yang, "Discrete dopant fluctuated 20 nm/15 nm-gate planar CMOS," IEEE Trans. Electron Devices, vol.55, no.6, pp. 1449-1455, Jun. 2008.
    • (2008) IEEE Trans. Electron Devices , vol.55 , Issue.6 , pp. 1449-1455
    • Li, Y.1    Yu, S.-M.2    Hwang, J.-R.3    Yang, F.-L.4
  • 24
    • 54549115996 scopus 로고    scopus 로고
    • Large-scale 'atomistic' approach to discrete-dopant-induced characteristic fluctuations in silicon nanowire transistors
    • May
    • Y. Li, C.-H. Hwang, and H.-M. Huang, "Large-scale 'atomistic' approach to discrete-dopant-induced characteristic fluctuations in silicon nanowire transistors," Phys. Stat. Sol.(A), vol.205, no.6, pp. 1505-1510, May 2008.
    • (2008) Phys. Stat. Sol.(A) , vol.205 , Issue.6 , pp. 1505-1510
    • Li, Y.1    Hwang, C.-H.2    Huang, H.-M.3
  • 26
    • 46049104218 scopus 로고    scopus 로고
    • Random impurity scattering induced variability in conventional nano-scaled MOSFETs: Ab initio impurity scattering Monte Carlo simulation study
    • Nov.
    • C. L. Alexander, G. Roy, and A. Asenov, "Random impurity scattering induced variability in conventional nano-scaled MOSFETs: Ab initio impurity scattering Monte Carlo simulation study," in IEDM Tech. Dig., Nov. 2006, pp. 949-952.
    • (2006) IEDM Tech. Dig. , pp. 949-952
    • Alexander, C.L.1    Roy, G.2    Asenov, A.3
  • 27
    • 40549144400 scopus 로고    scopus 로고
    • Implications of dopant-fluctuation-induced Vt variations on the radiation hardness of deep submicrometer CMOS SRAMs
    • Mar.
    • A. Balasubramanian, P. R. Fleming, B. L. Bhuva, A. L. Sternberg, and L. W. Massengill, "Implications of dopant-fluctuation-induced Vt variations on the radiation hardness of deep submicrometer CMOS SRAMs," IEEE Trans. Device Mater. Rel., vol.8, no.1, pp. 135-144, Mar. 2003.
    • (2003) IEEE Trans. Device Mater. Rel. , vol.8 , Issue.1 , pp. 135-144
    • Balasubramanian, A.1    Fleming, P.R.2    Bhuva, B.L.3    Sternberg, A.L.4    Massengill, L.W.5
  • 29
    • 42549130489 scopus 로고    scopus 로고
    • Investigation of SNM with random dopant fluctuations for FD SGSOI and FinFET 6T SOI SRAM cell by three-dimensional device simulation
    • Sep.
    • R. Tanabe, Y. Ashizawa, and H. Oka, "Investigation of SNM with random dopant fluctuations for FD SGSOI and FinFET 6T SOI SRAM cell by three-dimensional device simulation," in Proc. Simul. Semicond. Process. Device Conf., Sep. 2006, pp. 103-106.
    • (2006) Proc. Simul. Semicond. Process. Device Conf. , pp. 103-106
    • Tanabe, R.1    Ashizawa, Y.2    Oka, H.3
  • 32
    • 25144443976 scopus 로고    scopus 로고
    • Estimation of delay variations due to random-dopant fluctuations in nanoscale CMOS circuits
    • Sep.
    • H. Mahmoodi, S. Mukhopadhyay, and K. Roy, "Estimation of delay variations due to random-dopant fluctuations in nanoscale CMOS circuits," IEEE J. Solid-State Circuits, vol.40, no.9, pp. 1787-1796, Sep. 2005.
    • (2005) IEEE J. Solid-State Circuits , vol.40 , Issue.9 , pp. 1787-1796
    • Mahmoodi, H.1    Mukhopadhyay, S.2    Roy, K.3
  • 33
    • 57849152941 scopus 로고    scopus 로고
    • High-frequency characteristic fluctuations of nano-MOSFET circuit induced by random dopants
    • Dec.
    • Y. Li and C.-H. Hwang, "High-frequency characteristic fluctuations of nano-MOSFET circuit induced by random dopants," IEEE Trans.Microw. Theory Tech., vol.56, no.12, pp. 2726-2733, Dec. 2008.
    • (2008) IEEE Trans.Microw. Theory Tech. , vol.56 , Issue.12 , pp. 2726-2733
    • Li, Y.1    Hwang, C.-H.2
  • 34
    • 0029322064 scopus 로고
    • A neural network modeling approach to circuit optimization and statistical design
    • Jun.
    • A. Hafid Zaabab, Q.-J. Zhang, and M. Nakhla, "A neural network modeling approach to circuit optimization and statistical design," IEEE Trans. Microw. Theory Tech., vol.43, no.6, pp. 1349-1358, Jun. 1995.
    • (1995) IEEE Trans. Microw. Theory Tech. , vol.43 , Issue.6 , pp. 1349-1358
    • Hafid Zaabab, A.1    Zhang, Q.-J.2    Nakhla, M.3
  • 35
    • 0036539830 scopus 로고    scopus 로고
    • A statistical methodology for the design of high-performance CMOS current-steering digital-to-analog converters
    • Apr.
    • P. Crippa, C. Turchetti, and M. Conti, "A statistical methodology for the design of high-performance CMOS current-steering digital-to-analog converters," IEEE Trans. Comput.-Aided Design Integr. Circuits Syst., vol.21, no.4, pp. 377-394, Apr. 2002.
    • (2002) IEEE Trans. Comput.-Aided Design Integr. Circuits Syst. , vol.21 , Issue.4 , pp. 377-394
    • Crippa, P.1    Turchetti, C.2    Conti, M.3
  • 38
    • 51649125639 scopus 로고    scopus 로고
    • Numerical estimation of yield in sub-100-nm SRAM design using Monte Carlo simulation
    • Sep.
    • H. Nho, S.-S. Yoon, S. S.Wong, and S.-O. Jung, "Numerical estimation of yield in sub-100-nm SRAM design using Monte Carlo simulation," IEEE Trans. Circuits Syst. I, Exp. Briefs, vol.55, no.9, pp. 907-911, Sep. 2008.
    • (2008) IEEE Trans. Circuits Syst. I, Exp. Briefs , vol.55 , Issue.9 , pp. 907-911
    • Nho, H.1    Yoon, S.-S.2    Wong, S.S.3    Jung, S.-O.4
  • 39
    • 64549100212 scopus 로고    scopus 로고
    • Impact of additional factors in threshold voltage variability of metal/high-k gate stacks and its reduction by controlling crystalline structure and grain size in the metal gates
    • Dec.
    • K. Ohmori, T. Matsuki, D. Ishikawa, T. Morooka, T. Aminaka, Y. Sugita, T. Chikyow, K. Shiraishi, Y. Nara, and K. Yamada, "Impact of additional factors in threshold voltage variability of metal/high-k gate stacks and its reduction by controlling crystalline structure and grain size in the metal gates," in IEDM Tech. Dig., Dec. 2008, pp. 1-4.
    • (2008) IEDM Tech. Dig. , pp. 1-4
    • Ohmori, K.1    Matsuki, T.2    Ishikawa, D.3    Morooka, T.4    Aminaka, T.5    Sugita, Y.6    Chikyow, T.7    Shiraishi, K.8    Nara, Y.9    Yamada, K.10
  • 40
    • 57849122496 scopus 로고    scopus 로고
    • Statistical modeling of metal-gate work-function variability in emerging device technologies and implications for circuit design
    • H. Dadgour, V. De, and K. Banerjee, "Statistical modeling of metal-gate work-function variability in emerging device technologies and implications for circuit design," in Proc. ICCAD, 2008, pp. 270-277.
    • (2008) Proc. ICCAD , pp. 270-277
    • Dadgour, H.1    De, V.2    Banerjee, K.3
  • 41
    • 0034516719 scopus 로고    scopus 로고
    • Mixed-mode device simulation
    • Dec.
    • T. Grasser and S. Selberherr, "Mixed-mode device simulation," Microelectron. J., vol. 31, no. 11/12, pp. 873-881, Dec. 2000.
    • (2000) Microelectron. J. , vol.31 , Issue.11-12 , pp. 873-881
    • Grasser, T.1    Selberherr, S.2
  • 42
    • 26144448426 scopus 로고
    • Utilization of quantum distribution functions for ultra-submicron device transport
    • G. J. Iafrate, H. L. Grubin, and D. K. Ferry, "Utilization of quantum distribution functions for ultra-submicron device transport," Le Journal de Physique Colloques, vol. 42, no. C7, p. C7-307, 1981.
    • (1981) Le Journal de Physique Colloques , vol.42 , Issue.C7
    • Iafrate, G.J.1    Grubin, H.L.2    Ferry, D.K.3
  • 43
    • 0000776042 scopus 로고
    • Macroscopic physics of the silicon inversion layer
    • May
    • M. G. Ancona and H. F. Tiersten, "Macroscopic physics of the silicon inversion layer," Phys. Rev. B, Condens. Matter, vol.35, no.15, pp. 7959-7965, May 1987.
    • (1987) Phys. Rev. B, Condens. Matter , vol.35 , Issue.15 , pp. 7959-7965
    • Ancona, M.G.1    Tiersten, H.F.2
  • 44
    • 0026837568 scopus 로고
    • Simulation of ultra-small GaAs MESFET using quantum moment equations
    • Mar.
    • J.-R. Zhou and D. K. Ferry, "Simulation of ultra-small GaAs MESFET using quantum moment equations," IEEE Trans. Electron Devices, vol.39, no.3, pp. 473-478, Mar. 1992.
    • (1992) IEEE Trans. Electron Devices , vol.39 , Issue.3 , pp. 473-478
    • Zhou, J.-R.1    Ferry, D.K.2
  • 45
    • 0026908536 scopus 로고
    • Simulation of ultra-small GaAs MESFETs using quantum moment equations. II. Velocity overshoot
    • Aug.
    • J.-R. Zhou and D. K. Ferry, "Simulation of ultra-small GaAs MESFETs using quantum moment equations. II. Velocity overshoot," IEEE Trans. Electron Devices, vol.39, no.8, pp. 1793-1796, Aug. 1992.
    • (1992) IEEE Trans. Electron Devices , vol.39 , Issue.8 , pp. 1793-1796
    • Zhou, J.-R.1    Ferry, D.K.2
  • 46
    • 0027543250 scopus 로고
    • Modeling of quantum effects in ultrasmall HEMT devices
    • Feb.
    • J.-R. Zhou and D. K. Ferry, "Modeling of quantum effects in ultrasmall HEMT devices," IEEE Trans. Electron Devices, vol.40, no.2, pp. 421-427, Feb. 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , Issue.2 , pp. 421-427
    • Zhou, J.-R.1    Ferry, D.K.2
  • 47
    • 20344383924 scopus 로고    scopus 로고
    • Discretization scheme for the densitygradient equation and effect of boundary conditions
    • Oct.
    • T.-W. Tang, X. Wang, and Y. Li, "Discretization scheme for the densitygradient equation and effect of boundary conditions," J. Comput. Electron., vol.1, no.3, pp. 389-393, Oct. 2002.
    • (2002) J. Comput. Electron. , vol.1 , Issue.3 , pp. 389-393
    • Tang, T.-W.1    Wang, X.2    Li, Y.3
  • 48
    • 54249149841 scopus 로고    scopus 로고
    • Quantum aspects of resolving discrete charges in 'atomistic' device simulations
    • Dec.
    • G. Roy, A. R. Brown, A. Asenov, and S. Roy, "Quantum aspects of resolving discrete charges in 'atomistic' device simulations," J. Comput. Electron., vol.2, no.2-4, pp. 323-327, Dec. 2003.
    • (2003) J. Comput. Electron. , vol.2 , Issue.2-4 , pp. 323-327
    • Roy, G.1    Brown, A.R.2    Asenov, A.3    Roy, S.4
  • 49
    • 2942579366 scopus 로고    scopus 로고
    • Multidimensional discretization of the stationary quantum drift-diffusion model for ultrasmall MOSFET structures
    • Jun.
    • S. Odanaka, "Multidimensional discretization of the stationary quantum drift-diffusion model for ultrasmall MOSFET structures," IEEE Trans. Comput.-Aided Design Integr. Circuit Syst., vol.23, no.6, pp. 837-842, Jun. 2004.
    • (2004) IEEE Trans. Comput.-Aided Design Integr. Circuit Syst. , vol.23 , Issue.6 , pp. 837-842
    • Odanaka, S.1
  • 50
    • 0016059033 scopus 로고
    • Photoelectric work function of a molybdenum single crystal for the (100), (110), (111), (112), (114), and (332) faces
    • May
    • S. Berge, P.O. Gartland, and B.J. Slagsvold, "Photoelectric work function of a molybdenum single crystal for the (100), (110), (111), (112), (114), and (332) faces," Surf. Sci., vol.43, no.1, pp. 275-292, May 1974.
    • (1974) Surf. Sci. , vol.43 , Issue.1 , pp. 275-292
    • Berge, S.1    Gartland, P.O.2    Slagsvold, B.J.3
  • 52
    • 0035059401 scopus 로고    scopus 로고
    • Structure refinement and hardness enhancement of titanium nitride films by addition of copper
    • Mar.
    • J. L. He, Y. Setsuhara, I. Shimizu, and S. Miyake, "Structure refinement and hardness enhancement of titanium nitride films by addition of copper," Surf. Coat. Technol., vol.137, no.1, pp. 38-42, Mar. 2001.
    • (2001) Surf. Coat. Technol. , vol.137 , Issue.1 , pp. 38-42
    • He, J.L.1    Setsuhara, Y.2    Shimizu, I.3    Miyake, S.4
  • 53
    • 10644265317 scopus 로고    scopus 로고
    • Molybdenum gate technology for ultrathin-body MOSFETs and FinFETs
    • Dec.
    • H. Daewon, H. Takeuchi, Y.-K. Choi, and T.-J. King, "Molybdenum gate technology for ultrathin-body MOSFETs and FinFETs," IEEE Trans. Electron Devices, vol.51, no.12, pp. 1989-1996, Dec. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.12 , pp. 1989-1996
    • Daewon, H.1    Takeuchi, H.2    Choi, Y.-K.3    King, T.-J.4
  • 54
    • 76349092540 scopus 로고    scopus 로고
    • [Online]. Available:
    • [Online]. Available: http://www.itrs.net
  • 55
    • 34547328040 scopus 로고    scopus 로고
    • Width-dependent statistical leakage modeling for random dopant induced threshold voltage shift
    • G. Jie, S. S. Sapatnekar, and C. Kim, "Width-dependent statistical leakage modeling for random dopant induced threshold voltage shift," in Proc. Int. Conf. DAC, 2007, pp. 87-92.
    • (2007) Proc. Int. Conf. DAC , pp. 87-92
    • Jie, G.1    Sapatnekar, S.S.2    Kim, C.3
  • 56
    • 11044221347 scopus 로고    scopus 로고
    • A parallel adaptive finite volume method for nanoscale double-gate MOSFETs simulation
    • Mar.
    • Y. Li and S.-M. Yu, "A parallel adaptive finite volume method for nanoscale double-gate MOSFETs simulation," J. Comput. Appl. Math., vol.175, no.1, pp. 87-99, Mar. 2005.
    • (2005) J. Comput. Appl. Math. , vol.175 , Issue.1 , pp. 87-99
    • Li, Y.1    Yu, S.-M.2
  • 57
    • 0037416992 scopus 로고    scopus 로고
    • A novel parallel adaptive Monte Carlo method for nonlinear Poisson equation in semiconductor devices
    • Mar.
    • Y. Li, H.-M. Lu, T.-W. Tang, and S. M. Sze, "A novel parallel adaptive Monte Carlo method for nonlinear Poisson equation in semiconductor devices," Math. Comput. Simul., vol.62, no.3-6, pp. 413-420, Mar. 2003.
    • (2003) Math. Comput. Simul. , vol.62 , Issue.3-6 , pp. 413-420
    • Li, Y.1    Lu, H.-M.2    Tang, T.-W.3    Sze, S.M.4
  • 58
    • 0036361047 scopus 로고    scopus 로고
    • A practical implementation of parallel dynamic load balancing for adaptive computing in VLSI device simulation
    • Aug.
    • Y. Li, S. M. Sze, and T. S. Chao, "A practical implementation of parallel dynamic load balancing for adaptive computing in VLSI device simulation," Eng. Comput., vol.18, no.2, pp. 124-137, Aug. 2002.
    • (2002) Eng. Comput. , vol.18 , Issue.2 , pp. 124-137
    • Li, Y.1    Sze, S.M.2    Chao, T.S.3
  • 59
    • 0031236754 scopus 로고    scopus 로고
    • An improved electron and hole mobility model for general purpose device simulation
    • Sep.
    • M. N. Darwish, J. L. Lentz, M. R. Pinto, P. M. Zeitzoff, and T. Juong Krutsick, "An improved electron and hole mobility model for general purpose device simulation," IEEE Trans. Electron Devices, vol.44, no.9, pp. 1529-1538, Sep. 1997.
    • (1997) IEEE Trans. Electron Devices , vol.44 , Issue.9 , pp. 1529-1538
    • Darwish, M.N.1    Lentz, J.L.2    Pinto, M.R.3    Zeitzoff, P.M.4    Juong Krutsick, T.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.