Modeling statistical dopant fluctuations in MOS transistors

IEEE Transactions on Electron Devices

Volumn 45, Issue 9, 1998, Pages 1960-1971

  Stolk, Peter A ^a   Widdershoven, Frans P ^a   Klaassen, D B M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Cmos logic devices; Semiconductor device doping; Semiconductor device modeling; Silicon materials devices

Indexed keywords

CMOS INTEGRATED CIRCUITS; LOGIC DEVICES; MATHEMATICAL MODELS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DOPING; STATISTICAL METHODS;

CMOS LOGIC DEVICES; SEMICONDUCTOR DEVICE DOPING;

MOSFET DEVICES;

EID: 0032164821     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.711362     Document Type: Article

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