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Volumn , Issue , 2008, Pages 270-277

Statistical modeling of metal-gate work-function variability in emerging device technologies and implications for circuit design

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT DESIGNERS; CIRCUIT DESIGNS; CMOS TRANSISTORS; DEVICE TECHNOLOGIES; FABRICATION PROCESSES; GATE MATERIALS; GATE TRANSISTORS; KEY PARAMETERS; METAL NITRIDES; METAL WORKS; NEW SOURCES; PHYSICAL DIMENSIONS; PMOS DEVICES; RELIABILITY DEGRADATIONS; RELIABILITY PARAMETERS; SI DEVICES; SRAM CELLS; STATISTICAL FRAMEWORKS;

EID: 57849122496     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCAD.2008.4681585     Document Type: Conference Paper
Times cited : (84)

References (42)
  • 1
    • 0033362679 scopus 로고    scopus 로고
    • Technology and design challenges for low power and high performance
    • V. De and S. Borkar, "Technology and design challenges for low power and high performance," Int. Sym. on Low Power Electronics and Design, pp. 163-168, 1999.
    • (1999) Int. Sym. on Low Power Electronics and Design , pp. 163-168
    • De, V.1    Borkar, S.2
  • 2
    • 57849087524 scopus 로고    scopus 로고
    • 45 nm transistor reliability
    • J. Hicks et al., "45 nm transistor reliability," Intel Technology Journal, Vol. 12, pp. 131-144, 2008.
    • (2008) Intel Technology Journal , vol.12 , pp. 131-144
    • Hicks, J.1
  • 3
    • 2942689784 scopus 로고    scopus 로고
    • Fermi-level pinning at the polysilicon/metal oxide interface: Part I
    • C. Hobbs et al., "Fermi-level pinning at the polysilicon/metal oxide interface: part I," IEEE Trans. Electron Devices, Vol. 51, pp. 971-977, 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , pp. 971-977
    • Hobbs, C.1
  • 4
    • 33748614600 scopus 로고    scopus 로고
    • Advanced high-k dielectric stacks with polySi and metal-gates: Recent progress and current challenges
    • E.P. Gusev et al., "Advanced high-k dielectric stacks with polySi and metal-gates: recent progress and current challenges," IBM Journal of Research and Development, Vol. 50, pp. 387-410, 2006.
    • (2006) IBM Journal of Research and Development , vol.50 , pp. 387-410
    • Gusev, E.P.1
  • 5
    • 0035716168 scopus 로고    scopus 로고
    • E. Gusev et al., Ultrathin high-k gate stacks for advanced CMOS devices, IEDM Tech. Dig., pp. 20.1.1-20.1.4, 2001.
    • E. Gusev et al., "Ultrathin high-k gate stacks for advanced CMOS devices," IEDM Tech. Dig., pp. 20.1.1-20.1.4, 2001.
  • 6
    • 57849091968 scopus 로고    scopus 로고
    • S. Datta et al., High mobility Si/SiGe strained channel MOS transistors with HfO2/TiN gate stack, IEDM Tech. Dig., pp 18.1.1-28.1.4, 2003.
    • S. Datta et al., "High mobility Si/SiGe strained channel MOS transistors with HfO2/TiN gate stack," IEDM Tech. Dig., pp 18.1.1-28.1.4, 2003.
  • 8
    • 0035423578 scopus 로고    scopus 로고
    • Improvement of threshold voltage deviation in damascene metal-gate transistors
    • A. Yagishita et al., "Improvement of threshold voltage deviation in damascene metal-gate transistors," IEEE Trans. on Electron Devices, Vol. 48, pp. 1604-1611, 2001.
    • (2001) IEEE Trans. on Electron Devices , vol.48 , pp. 1604-1611
    • Yagishita, A.1
  • 9
    • 0038161696 scopus 로고    scopus 로고
    • High performance silicon nanowire field effect transistors
    • Y. Cui et al., "High performance silicon nanowire field effect transistors," Nano Letters, Vol. 3, pp. 149 -152, 2003.
    • (2003) Nano Letters , vol.3 , pp. 149-152
    • Cui, Y.1
  • 10
    • 0032492884 scopus 로고    scopus 로고
    • Room-temperature transistor based on a single carbon nanotube
    • S. J. Tans, A. R. M. Verschueren, and C. Dekker, "Room-temperature transistor based on a single carbon nanotube," Nature, Vol. 393, pp. 49-52, 1998.
    • (1998) Nature , vol.393 , pp. 49-52
    • Tans, S.J.1    Verschueren, A.R.M.2    Dekker, C.3
  • 13
    • 0021422979 scopus 로고
    • The development of grain structure during growth of metallic films
    • C. R. M. Grovenor et al., "The development of grain structure during growth of metallic films," Acta Materiatia, Vol 32, pp. 773-781, 1984.
    • (1984) Acta Materiatia , vol.32 , pp. 773-781
    • Grovenor, C.R.M.1
  • 14
    • 0017719586 scopus 로고
    • Structure and topography of sputtered coatings
    • J. A. Thornton, "Structure and topography of sputtered coatings," Annual Review Material Science, Vol. 7, pp. 239-260, 1977.
    • (1977) Annual Review Material Science , vol.7 , pp. 239-260
    • Thornton, J.A.1
  • 15
    • 35949027123 scopus 로고
    • Theory of metal surfaces: Charge density and surface energy
    • N. Lang and W. Kohn, "Theory of metal surfaces: charge density and surface energy," Physical Review B, Vol. 1, pp. 4555-4568, 1970.
    • (1970) Physical Review B , vol.1 , pp. 4555-4568
    • Lang, N.1    Kohn, W.2
  • 16
    • 33751225993 scopus 로고    scopus 로고
    • Characterization of electrical and crystallographic properties of metal layers at deca-nanometer scale using Kelvin probe force microscope
    • N. Gaillard et al., "Characterization of electrical and crystallographic properties of metal layers at deca-nanometer scale using Kelvin probe force microscope," Microelectronic Engineering, Vol. 83, pp. 2169-2174, 2006.
    • (2006) Microelectronic Engineering , vol.83 , pp. 2169-2174
    • Gaillard, N.1
  • 17
    • 56849086608 scopus 로고    scopus 로고
    • 45nm high-k+metal-gate strain-enhanced transistors
    • C. Auth et al., "45nm high-k+metal-gate strain-enhanced transistors", Intel Technology Journal, Vol. 12, pp. 77-86, 2008.
    • (2008) Intel Technology Journal , vol.12 , pp. 77-86
    • Auth, C.1
  • 18
    • 34247097018 scopus 로고    scopus 로고
    • Extracting the relative dielectric constant for "high-κ layers" from CV measurements - Errors and error propagation
    • O. Buiu et al., "Extracting the relative dielectric constant for "high-κ layers" from CV measurements - Errors and error propagation," Microelectronics Reliability, Vol. 47, pp. 678-681, 2007.
    • (2007) Microelectronics Reliability , vol.47 , pp. 678-681
    • Buiu, O.1
  • 19
    • 0002493672 scopus 로고
    • The diffraction of short electromagnetic waves by a crystal
    • W.L. Bragg, "The diffraction of short electromagnetic waves by a crystal", Proceedings of the Cambridge Philosophical Society, Vol. 17, pp. 43-57, 1914.
    • (1914) Proceedings of the Cambridge Philosophical Society , vol.17 , pp. 43-57
    • Bragg, W.L.1
  • 20
    • 34547924169 scopus 로고    scopus 로고
    • Composition dependence of work-function in metal (Ni,Pt)-Germanide gate electrodes
    • D. Ikeno, et al., "Composition dependence of work-function in metal (Ni,Pt)-Germanide gate electrodes", Jap. J. of Appl. Phys., Vol. 46, pp. 1865-1869, 2007.
    • (2007) Jap. J. of Appl. Phys , vol.46 , pp. 1865-1869
    • Ikeno, D.1
  • 22
    • 0034317956 scopus 로고    scopus 로고
    • Oxide thickness variation induced threshold voltage fluctuations in decanano MOSFETs: A 3D density gradient simulation study
    • A. Asenov et al., "Oxide thickness variation induced threshold voltage fluctuations in decanano MOSFETs: a 3D density gradient simulation study," Superlattices and Microstructures, Vol. 28, pp. 507-515, 2000.
    • (2000) Superlattices and Microstructures , vol.28 , pp. 507-515
    • Asenov, A.1
  • 23
    • 0035158946 scopus 로고    scopus 로고
    • Metal-gates for advanced sub-80-nm SOI CMOS technology
    • B. Cheng et al., "Metal-gates for advanced sub-80-nm SOI CMOS technology," SOI conference, pp. 91-92, 2001.
    • (2001) SOI conference , pp. 91-92
    • Cheng, B.1
  • 24
    • 5744251698 scopus 로고    scopus 로고
    • Extremely scaled silicon nano-CMOS devices
    • L. Chang et al., "Extremely scaled silicon nano-CMOS devices," Proceedings of the IEEE, Vol. 91, pp. 1860-1873, 2003.
    • (2003) Proceedings of the IEEE , vol.91 , pp. 1860-1873
    • Chang, L.1
  • 25
    • 0034453382 scopus 로고    scopus 로고
    • Molybdenum metal-gate MOS technology for post-SiO2 gate dielectrics
    • Q. Lu et al., "Molybdenum metal-gate MOS technology for post-SiO2 gate dielectrics," IEDM Technical Digest, pp. 641-644, 2000.
    • (2000) IEDM Technical Digest , pp. 641-644
    • Lu, Q.1
  • 26
    • 0036160670 scopus 로고    scopus 로고
    • An adjustable work-function technology using Mo gate for CMOS devices
    • R. Lin et al., "An adjustable work-function technology using Mo gate for CMOS devices," IEEE Electron Device Letters, Vol. 23, pp. 49-51, 2002.
    • (2002) IEEE Electron Device Letters , vol.23 , pp. 49-51
    • Lin, R.1
  • 27
    • 33748865991 scopus 로고    scopus 로고
    • Thermal annealing effects on physical properties of a representative high-k/metal film stack
    • M. M. Hussain et al., "Thermal annealing effects on physical properties of a representative high-k/metal film stack", Semiconductor Science Technology, Vol. 21, pp. 1437-1440, 2006.
    • (2006) Semiconductor Science Technology , vol.21 , pp. 1437-1440
    • Hussain, M.M.1
  • 28
    • 0035059401 scopus 로고    scopus 로고
    • Structure refinement and hardness enhancement of titanium nitride films by addition of copper
    • J. L. He et al., "Structure refinement and hardness enhancement of titanium nitride films by addition of copper," Surface and Coatings Technology, Vol. 137, pp. 38-42, 2001.
    • (2001) Surface and Coatings Technology , vol.137 , pp. 38-42
    • He, J.L.1
  • 29
    • 34547837260 scopus 로고    scopus 로고
    • Thermal and electrical properties of 5-nm-thick TaN film prepared by atomic layer deposition using a Pentakis(ethylmethylamino) tantalum precursor for copper metallization
    • N. Bae et al., "Thermal and electrical properties of 5-nm-thick TaN film prepared by atomic layer deposition using a Pentakis(ethylmethylamino) tantalum precursor for copper metallization," Jap. J. of Appl. Phys., Vol. 45, pp. 9072-9074, 2006.
    • (2006) Jap. J. of Appl. Phys , vol.45 , pp. 9072-9074
    • Bae, N.1
  • 31
    • 0034438343 scopus 로고    scopus 로고
    • H. Kawasaki et al., Tantalum nitride thin films synthesized by pulsed Nd:YAG laser deposition method, Material Research Society Symposium Proceedings, 617, pp. J3.22.1-J3.22.5, 2001.
    • H. Kawasaki et al., "Tantalum nitride thin films synthesized by pulsed Nd:YAG laser deposition method," Material Research Society Symposium Proceedings, Vol. 617, pp. J3.22.1-J3.22.5, 2001.
  • 32
    • 0033692012 scopus 로고    scopus 로고
    • Improved metal-gate process by simultaneous gate-oxide nitridation during W/WNx gate formation
    • M. Moriwaki et al., "Improved metal-gate process by simultaneous gate-oxide nitridation during W/WNx gate formation," Japanese Journal of Applied Physics, Vol. 39, pp. 2177-2180, 2000.
    • (2000) Japanese Journal of Applied Physics , vol.39 , pp. 2177-2180
    • Moriwaki, M.1
  • 33
    • 0037666382 scopus 로고    scopus 로고
    • Structural and mechanical properties of chromium nitride, molybdenum nitride, and tungsten nitride thin films
    • P. Hones et al., "Structural and mechanical properties of chromium nitride, molybdenum nitride, and tungsten nitride thin films," J. of Appl. Phys., Vol. 36, pp. 1023-1029(7), 2003.
    • (2003) J. of Appl. Phys , vol.36 , Issue.7 , pp. 1023-1029
    • Hones, P.1
  • 34
    • 0031562652 scopus 로고    scopus 로고
    • Application of Brodie's concept of the work-function to simple metals
    • K. F. Wojciechowski, "Application of Brodie's concept of the work-function to simple metals," Europhysics Letter, Vol. 38, pp. 135-140, 1997.
    • (1997) Europhysics Letter , vol.38 , pp. 135-140
    • Wojciechowski, K.F.1
  • 35
    • 10644265317 scopus 로고    scopus 로고
    • Molybdenum gate technology for ultrathin-body MOSFETs and FinFETs
    • H. Daewon et al., "Molybdenum gate technology for ultrathin-body MOSFETs and FinFETs," IEEE Trans. on Electron Devices, Vol. 51, pp. 1989-1996, 2004.
    • (2004) IEEE Trans. on Electron Devices , vol.51 , pp. 1989-1996
    • Daewon, H.1
  • 36
    • 0016059033 scopus 로고
    • Photoelectric work-function of a molybdenum single crystal for the (100), (110), (111), (112), (114), and (332) faces
    • S. Berge, P. O. Gartland, and B. J. Slagsvold, "Photoelectric work-function of a molybdenum single crystal for the (100), (110), (111), (112), (114), and (332) faces," Surface Science, Vol. 43, pp. 275-292, 1974.
    • (1974) Surface Science , vol.43 , pp. 275-292
    • Berge, S.1    Gartland, P.O.2    Slagsvold, B.J.3
  • 37
    • 57849139558 scopus 로고    scopus 로고
    • 45nm design for manufacturing
    • C. Webb, "45nm design for manufacturing," Intel Technology Journal, Vol. 12, pp. 121-130, 2008.
    • (2008) Intel Technology Journal , vol.12 , pp. 121-130
    • Webb, C.1
  • 39
    • 0032320827 scopus 로고    scopus 로고
    • Random dopant induced threshold voltage lowering and fluctuations in sub-0.1 μm MOSFET's: A 3-D "atomistic" simulation study
    • A. Asenov, "Random dopant induced threshold voltage lowering and fluctuations in sub-0.1 μm MOSFET's: A 3-D "atomistic" simulation study," IEEE Trans. on Electron Devices, Vol. 45, pp. 2505-2513, 1998.
    • (1998) IEEE Trans. on Electron Devices , vol.45 , pp. 2505-2513
    • Asenov, A.1
  • 40
    • 2642552225 scopus 로고    scopus 로고
    • TCAD-based statistical analysis and modeling of gate line-edge roughness effect on nanoscale MOS transistor performance and scaling
    • K. Seong-Dong et al., "TCAD-based statistical analysis and modeling of gate line-edge roughness effect on nanoscale MOS transistor performance and scaling," IEEE Trans. on Semiconductor Manufacturing, Vol. 17, pp. 192-200, 2004.
    • (2004) IEEE Trans. on Semiconductor Manufacturing , vol.17 , pp. 192-200
    • Seong-Dong, K.1
  • 41
    • 57849106588 scopus 로고    scopus 로고
    • Online, Available
    • "International Technology Roadmap for Semiconductors, 2005 Edition, Semiconductor Industry Association. [Online]. Available: http://www.itrs.net/ Links/2005ITRS/Home2005.htm".
    • (2005) Edition, Semiconductor Industry Association
  • 42
    • 31344451652 scopus 로고    scopus 로고
    • A 3-GHz 70-Mb SRAM in 65-nm CMOS technology with integrated column-based dynamic power supply
    • K. Zhang et al., "A 3-GHz 70-Mb SRAM in 65-nm CMOS technology with integrated column-based dynamic power supply," IEEE Journal of Solid-State Circuits, Vol. 41, pp. 146-151, 2006.
    • (2006) IEEE Journal of Solid-State Circuits , vol.41 , pp. 146-151
    • Zhang, K.1


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