Effects of gate depletion and boron penetration on matching of deep submicron CMOS transistors

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 631-634

  Tuinhout, H P ^a   Montree, A H ^a   Schmitz, J ^a   Stolk, P A ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

TRANSISTOR MATCHING;

COMPOSITION EFFECTS; GATES (TRANSISTOR); GRAIN SIZE AND SHAPE; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING BORON; SEMICONDUCTING SILICON;

CMOS INTEGRATED CIRCUITS;

EID: 84886448106     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)