Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner

IEEE/ASME Transactions on Mechatronics

Volumn 5, Issue 3, 2000, Pages 273-280

  Ku, Sang Soon ^a   Pinsopon, Unnat ^a  

^a 1120 Science and Engineering Offices   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); FEEDBACK CONTROL; LEARNING SYSTEMS; MATHEMATICAL MODELS; NEURAL NETWORKS; POSITION CONTROL;

CEREBELLAR MODEL ARTICULATION CONTROLLER; NANOPOSITIONERS;

MECHATRONICS;

EID: 0034271681     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.868919     Document Type: Article

References (18)

1. U. Pinsopon, S. Nakajima, and S. Cetinkunt, "Design, fabrication and real-time neural network control of a piezoelectric actuated tool post," in Proc. ASME Dynamic Systems and Control, IMECE-95, vol. 57, 1995, pp. 767-772.
2. S. Cetinkunt and A. Donmez, "CMAC learning controller for servo control of high precision machine tools," in Proc. American Control Conf., San Francisco, CA, June 1993, pp. 1976-1980.
3. G. Larsen, S. Cetinkunt, and A. Donmez, "CMAC neural network control for high precision motion control in presence of large friction," ASMEJ. Dynam. Syst., Meas. Contr., vol. 117, pp. 415-120, Sept. 1995.
4. G. Larsen and S. Cetinkunt, "Low speed motion control experiments on a single point diamond turning machine using CMAC learning control algorithm,"ASMEJ. Dynam. Syst., Meas. Contr., vol. 119, pp. 775-781, Dec. 1997.
5. B. Keauskopf, "Diamond turning: Reflecting demands for precision," Manuf. Eng., pp. 90-100, May 1984.
6. T. G. Bifano, T. A. Dow, and R. O. Scattergood, "Ductile regime grinding: a new technology for machining brittle materials," ASME J. Eng. Ind., vol. 113, pp. 184-189, 1991.
7. S.-S. Ku, G. Larsen, and S. Cetinkunt, "Fast tool servo control for ultraprecision machining at extremely low feed rates," J. Mechatron., vol. 8, no. 4, pp. 381-393, 1998.
8. S. R. Patterson and E. B. Magrab, "Design and testing of a fast tool servo for diamond turning," Precis. Eng., vol. 7, no. 3, pp. 151-156, 1985.
9. Y. Hara, S. Motonishi, and K. Yoshida, "A new micro-cutting device with high stiffness and resolution," CIRP Ann., vol. 39, no. 1, pp. 375-378, 1990.
10. Y. Okazaki, "A micro-positioning tool post using a piezoelectric actuator for diamond turning machines, "Precis. Eng., vol. 12, no. 3, pp. 151-156, 1990.
11. T. G. King, "Piezoelectric ceramic actuators: A review of machinery application," Free. Eng., vol. 12, no. 3, pp. 131-136, 1990.
12. R. Yang, M. Jouaneh, and R. Schweizer, " Design and characterization of a low-profile micro positioning stage," Precis. Eng., vol. 18, no. 1, pp. 20-29, 1996.
13. R. Ge and R. Jouaneh, "Modeling hysteresis in piezoceramic actuators," Precis. Eng., vol. 17, no. 3, pp. 211-221, 1995.
14. J. Albus, Brains, Behavior, and Robotics. Peterborough, NH: BYTE Books, 1981.
15. "A new approach to manipulator control: The cerebellar model articulation controller (CMAC)," ASME J. Dynam. Syst., Meas. Contr., pp. 220-227, Sept. 1975.
16. "Data storage in the cerebella model articulation controller (CMAC)," ASME J. Dynam. Syst., Meas. Contr., pp. 228-233, Sept. 1975.
17. Y F. Wong and A. Sideris, "Learning convergence in the cerebella model articulation controller," IEEE Trans. Neural Networks, vol. 3, pp. 115-120, Jan. 1992.
18. W. T. Miller, F. H. Glanz, and L. G. Kraft, "Application of a general learning algorithm to the control of robotic manipulators," Int. J. Robot. Res., vol. 6, no. 2, pp. 84-98, 1987.