Design and characterization of a low-profile micropositioning stage

Precision Engineering

Volumn 18, Issue 1, 1996, Pages 20-29

  Yang, Renyi ^a   Jouaneh, Musa ^a   Schweizer, Rudolph ^b  

^a University of Rhode Island   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

Flexure hinge; Micropositioning stage; Piezo actuator

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; LASER BEAM WELDING; MATHEMATICAL MODELS; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; POSITION CONTROL; PRODUCT DESIGN; STIFFNESS;

FLEXURE HINGE; HORIZONTAL MOTION; LEVER ARRANGEMENT; MECHANICAL STRUCTURE; MICROPOSITIONING STAGE; PIEZOELECTRIC ACTUATOR; VERTICAL MOTION;

ACTUATORS;

EID: 0029755070     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(95)00032-1     Document Type: Article

References (8)

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