New piezodriven precision micropositioning stage utilizing flexure hinges

Nanotechnology

Volumn 10, Issue 4, 1999, Pages 394-398

  Gao, Peng ^a   Swei, Shan Min ^a   Yuan, Zhejun ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

HINGES; MATHEMATICAL MODELS; MECHANISMS; PIEZOELECTRIC DEVICES;

PIEZODRIVEN PRECISION MICROPOSITIONING STAGES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033335330     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/10/4/306     Document Type: Article

References (8)

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