Characterization of electrothermal actuators and arrays fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 769-772

  Comtois, John H ^a   Michalicek, M Adrian ^a   Barron, Carole Craig ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ARRAYS; CHARACTERIZATION; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING;

ELECTROTHERMAL MICROACTUATORS; FOUR LEVEL PLANARIZED POLYCRYSTALLINE SILICON; MICROACTUATORS; SINGLE ACTUATOR TESTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030719706     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)