A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation

Journal of Micromechanics and Microengineering

Volumn 13, Issue 2, 2003, Pages 295-299

  Liu, Hongzhong ^a   Lu, Bingheng ^a   Ding, Yucheng ^a   Tang, Yiping ^a   Li, Dichen ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIGITAL FILTERS; NONLINEAR SYSTEMS; PIEZOELECTRIC DEVICES; POSITION CONTROL; SERVOMOTORS; SPURIOUS SIGNAL NOISE;

PIEZO ACTUATORS;

COMPOSITE MICROMECHANICS;

EID: 0037342290     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/2/318     Document Type: Article

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