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Journal of Microelectromechanical Systems

Volumn 10, Issue 2, 2001, Pages 247-254

Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices

(3) Que, Long a,b Park, Jae Sung c Gianchandani, Yogesh B a,c

a IEEE (United States)

b OpticNet Inc (United States)

c University of Wisconsin Madison (United States)

Author keywords

Micromachining; Micromotors; Positioners; Thermal actuators

Indexed keywords

ELECTRONIC INTERFACES; ELECTROTHERMAL ACTUATORS; POWER CONSUMPTION;

ELECTRIC CURRENTS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; NICKEL; SILICON; THERMAL EXPANSION; THERMAL STRESS;

MICROACTUATORS;

EID: 0035368251 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.925771 Document Type: Article

Times cited : (340)

References (32)

1
- 0031650483
- Closed loop controlled, large throw, magnetic linear microactuator with 1000 μm structural height
- Heidelberg, Germany, Jan.
- (1998) Proc. IEEE International Workshop on Micro Electro Mechanical Systems (MEMS'98) , pp. 414-418
- Guckel, H.¹ Fisher, K.² Stiers, E.³

2
- 0026839737
- Piezoelectric micromotors
- Mar.
- (1992) J. Microelectromech. Syst. , vol.1 , pp. 44-52
- Flynn, A.M.¹ Tavrow, L.S.² Bart, S.F.³ Brooks, R.A.⁴ Ehrlich, D.J.⁵ Udayakumar, K.R.⁶ Cross, L.E.⁷

3
- 0029510958
- Silicon microvalves for gas flow control
- Stockholm, Sweden, June
- (1995) Proc. IEEE Int. Conference on Solid-State Sensors and Actuators (Transducers '95) , vol.2 , pp. 276-280
- Barth, P.W.¹

4
- 0002586407
- Thermopneumatically actuated microvalves and integrated electro-fluidic circuits
- Hilton Head, SC, June
- (1994) Proc. Solid-State Sensor and Actuator Workshop (Hilton Head '94) , pp. 251-255
- Zdeblick, M.J.¹ Anderson, R.² Jankowski, J.³ Klein-Schoder, B.⁴ Christel, L.⁵ Miles, R.⁶ Weber, W.⁷

5
- 0024769661
- Laterally driven polysilicon resonant microstructures
- (1989) Sensors Actuators , vol.20 , pp. 25-32
- Tang, W.C.¹ Nguyen, T.C.H.² Howe, R.T.³

6
- 0026403028
- New opportunities for microactuators
- San Francisco, CA, June
- (1991) Proc. IEEE Int. Conference on Solid-State Sensors and Actuators (Transducers '91) , pp. 14-20
- Fujita, H.¹ Gabriel, K.J.²

7
- 0027664612
- Controlled stepwise motion in polysilicon actuators
- Sept.
- (1993) J. Microelectromech. Syst. , vol.2 , Issue.3 , pp. 106-110
- Akiyama, T.¹ Shono, K.²

8
- 0032027274
- Design and characterization of high-torque/low-speed silicon based electrostatic micromotors using stator/rotor contact interactions
- March
- (1998) Japanese J. Appl. Phys. , vol.37 , Issue.3 B
- Minotti, P.¹ Langlet, P.² Bourbon, G.³ Masuzawa, T.⁴

9
- 0030700079
- A quantitative analysis of scratch drive actuation for integrated X/Y motion system
- Chicago, IL, June
- (1997) Proc. IEEE Int. Conference on Solid-State Sensors and Actuators (Transducers '97) , pp. 773-776
- Langlet, P.¹ Collard, D.² Akiyama, T.³ Fujita, H.⁴

10
- 0034275514
- Micro-discharge and electric breakdown in a micro-gap
- (2000) IOP J. Micromech. Microeng. , vol.10 , pp. 445-451
- Ono, T.¹ Sim, D.Y.² Esashi, M.³

11
- 0024029518
- Thermally excited silicon microactuators
- June
- (1988) IEEE Trans. Electron Devices , vol.35 , pp. 758-763
- Riethmuller, W.¹ Benecke, W.²

12
- 0001203524
- Lateral in-plane displacement microactuators with combined thermal and electrostatic drive
- Hilton Head, SC, June
- (1996) Proc. Solid-State Sensor and Actuator Workshop , pp. 152-155
- Sun, X.-Q.¹ Gu, X.² Carr, W.N.³

13
- 0001253997
- Thermally excited inchworm actuators and stepwise micromotors: Analysis and fabrication
- (1997) Proc. SPIE , vol.3224 , pp. 372-379
- Okyar, M.¹ Sun, X.-Q.² Carr, W.N.³

14
- 0027876248
- Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
- Dec.
- (1993) J. Microelectromech. Syst. , vol.2 , pp. 146-150
- Ataka, M.¹ Omodaka, A.² Takeshima, N.³ Fujita, H.⁴

15
- 0033338446
- CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects
- Dec.
- (1999) J. Microelectromech. Syst. , vol.8 , Issue.4 , pp. 483-496
- Suh, J.W.¹ Darling, R.B.² Bohringer, K.-F.³ Donald, B.R.⁴ Baltes, H.⁵ Kovacs, G.T.A.⁶

16
- 0032687822
- A robust micro conveyor realized by arrayed polyimide joint actuators
- Orlando, FL, Jan.
- (1999) Proc. IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS99)
- Ebefors, T.¹ Mattson, J.U.² Kalvesten, E.³ Stemme, G.⁴

17
- 4243837808
- Surface micromachined linear thermal actuator
- Dec.
- (1990) Proc. IEEE Electron Devices Meeting
- Judy, J.W.¹ Tamagawa, T.² Polla, D.L.³

18
- 0026982125
- Thermo-magnetic metal flexure actuators
- June
- (1992) Proc. Solid-State Sensor and Actuator Workshop (Hilton Head '92) , pp. 73-75
- Guckel, H.¹ Klein, J.² Christenson, T.³ Skrobis, K.⁴ Laudon, M.⁵ Lovell, E.G.⁶

19
- 0029543056
- Nickel-filled HEXSIL thermally actuated tweezers
- Stockholm, Sweden, June
- (1995) Proc. IEEE Int. Conference on Solid-State Sensors and Actuators (Transducers '95) , pp. 376-379
- Keller, C.G.¹ Howe, R.T.²

20
- 0030719706
- Characterization of electrothermal actuators in a four-level, planarized surface-micromachined polycrystalline process
- Chicago, IL, June
- (1997) Proc. IEEE Int. Conf. on Solid-State Sensors and Actuators (Transducers '97) , pp. 769-772
- Comtois, J.H.¹ Michalicek, M.A.² Barron, C.C.³

21
- 85122708645
- Micromechanical devices with embedded electro-thermal-compliant actuation
- (1999) Proc. ASME Winter Annu. Meeting , vol.1 MEMS , pp. 553-560
- Moulton, T.¹ Ananthasuresh, G.K.²

22
- 0032688946
- Compliant electro-thermal microactuators
- Orlando, FL
- (1999) IEEE Conf. on Micro Electro Mechanical Systems , pp. 588-592
- Jonsmann, J.¹ Sigmund, O.² Bouwstra, S.³

23
- 0030699807
- Linear microactuators based on shape memory alloy effect
- Chicago, IL, June
- (1997) Proc. IEEE Int. Conf. on Solid-State Sensors and Actuators (Transducers '97) , pp. 785-788
- Kohl, M.¹ Skrobanek, K.D.²

24
- 0030109553
- Bent-beam strain sensors
- Mar.
- (1996) J. Microelectromech. Syst. , vol.5 , Issue.1 , pp. 52-58
- Gianchandani, Y.B.¹ Najafi, K.²

25
- 0026406269
- Electrostatic parallelogram actuators
- June
- (1991) Proc. IEEE Int. Conf. on Solid-State Sensors and Actuators (Transducers '91) , pp. 63-66
- Takeshima, N.¹ Gabriel, K.J.² Ozaki, M.³ Takahashi, J.⁴ Horiguchi, H.⁵ Fujita, H.⁶

26
- 0032638137
- Bent-beam electro-thermal actuators for high force applications
- Orlando, FL, Jan.
- (1999) Proc. IEEE Conf. on Micro Electro Mechanical Systems , pp. 31-36
- Que, L.¹ Park, J.-S.² Gianchandani, Y.B.³

27
- 0029489901
- Silicon fusion bonding and deep reactive ion etching: A new technology for microstructures
- Stockholm, Sweden, June
- (1995) Proc. Int. Conf. on Solid-State Sensors and Actuators (Transducers '95) , pp. 556-559
- Klassen, E.H.¹ Petersen, K.² Noworolksi, J.M.³ Logan, J.⁴ Maluf, N.I.⁵ Brown, J.⁶ Storment, C.⁷ McCulley, W.⁸ Kovacs, G.T.A.⁹

28
- 0035369726
- Bent-beam electrothermal actuators-part II: Linear and rotary microengines
- June
- (2001) J. Microelectromech. Syst. , vol.10 , pp. 255-262
- Park, J.-S.¹ Chu, L.L.² Oliver, A.D.³ Gianchandani, Y.B.⁴

29
- 0002284323
- Bonding techniques for microsensors
- New York: Elsevier Science
- (1985) Micromachining and Micropackaging of Sensors
- Ko, W.H.¹ Suminto, J.T.² Yeh, G.J.³

30
- 0026881397
- A bulk silicon dissolved wafer process for microelectromechanical devices
- June
- (1992) J. Microelectromech. Syst. , vol.1 , Issue.2 , pp. 77-85
- Gianchandani, Y.B.¹ Najafi, K.²

31
- 0031275324
- Scanning thermal profilers with integrated sensing and actuation
- Nov.
- (1997) IEEE Trans. Electron Devices , vol.44 , Issue.11 , pp. 1857-1868
- Gianchandani, Y.B.¹ Najafi, K.²

32
- 0035013831
- Pulse and deoperation lifetimes of bent-beam electrothermal actuators
- Interlaken, Switzerland, Jan.
- (2001) Proc. IEEE/ASME Int. Conference on Micro Electro Mechanical Systems (MEMS 01)
- Que, L.¹ Otradovec, L.² Oliver, A.³ Gianchandani, Y.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.