Self-assembled microactuated XYZ stages for optical scanning and alignment

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 319-322

  Fan, Li ^a   Wu, Ming C ^a   Choquette, Kent D ^a   Crawford, Mary H ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALIGNMENT; FOCUSING; MICROMACHINING; OPTICAL INSTRUMENT LENSES; OPTICAL RESOLVING POWER; SCANNING;

INTEGRATED SCRATCH DRIVE ACTUATORS (SDA); MICRO FRESNEL LENS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030652978     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)