Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation

International Journal of Machine Tools and Manufacture

Volumn 41, Issue 1, 2001, Pages 51-63

  Pahk, Heui Jae ^a   Lee, Dong Sung ^a   Park, Jong Ho ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIGITAL FILTERS; LITHOGRAPHY; PRECISION ENGINEERING; SERVOMOTORS;

GLOBAL COARSE STAGE; MICRO FINE STAGE; POSITIONAL ACCURACY; ULTRA PRECISION POSITIONING;

POSITION CONTROL;

EID: 0343441536     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(00)00061-4     Document Type: Article

References (8)

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