Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

Journal of Microelectromechanical Systems

Volumn 10, Issue 2, 2001, Pages 255-262

  Park, Jae Sung ^b   Chu, Larry L ^b   Oliver, Andrew D ^c   Gianchandani, Yogesh B ^a,b  

^a IEEE   (United States)

^b University of Wisconsin Madison   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Inchworm; Micromachining; Micromotor; Positioner; Scanner; Thermal actuator

Indexed keywords

ELECTROTHERMAL ACTUATORS; MICROENGINES; MICROMOTORS; POSITIONER; POWER DISSIPATION;

ELECTRIC POTENTIAL; ELECTROPLATING; MICROMACHINING; NICKEL; POLYSILICON; ROTARY ENGINES;

MICROACTUATORS;

EID: 0035369726     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.925774     Document Type: Article

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