Large-strain, piezoelectric, in-plane micro-actuator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 454-457

  Conway, Nicholas J ^a   Kim, Sang Gook ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; ANNEALING; ELECTRIC RELAYS; ELECTRODES; ENERGY DISSIPATION; FATIGUE TESTING; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; SOL-GELS; THIN FILMS;

PEAK STATIC FORCE; PIEZOELECTRIC ACTUATORS; STRAIN AMPLIFICATION; TRADE-OFF;

MICROACTUATORS;

EID: 3042743858     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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