MEMS milliactuator for hard-disk-drive tracking servo

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 149-155

  Hirano, Toshiki ^b,c,e,f   Fan, Long Sheng ^a,b,g,h   Gao, Jenny Q ^b,d,g,i,j,k   Lee, Wen Y ^b,l  

^a IEEE

^b IBM ALMADEN RESEARCH CENTER   (United States)

^c IBM JAPAN LTD   (Japan)

^d RAYTHEON COMPANY   (United States)

^e UNIVERSITY OF TOKYO   (Japan)

^f INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^g UNIVERSITY OF CALIFORNIA   (United States)

^h MEMS Technology and Devices

ⁱ TOHOKU UNIVERSITY   (Japan)

^j Semiconduct Res Lab Oki E

^k MEMS Technology and Devices ^*  (Spain)

^l UNIVERSITY OF WASHINGTON   (United States)

more..

Author keywords

Hard disk drives; High aspect ratio structure; High bandwidth tracking servo; Invar plating; Microactuator

Indexed keywords

ACTUATORS; ASPECT RATIO; ETCHING; HARD DISK STORAGE; POLYMER MEMBRANE ELECTRODES; SERVOMECHANISMS; STIFFNESS; THERMAL EXPANSION;

HIGH ASPECT RATIO POLYMER ETCHING; HIGH BANDWIDTH TRACKING SERVO; INVAR PLATING;

MICROELECTROMECHANICAL DEVICES;

EID: 0032096224     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679336     Document Type: Article

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