The design and characterization of a piezo-driven ultra-precision stepping positioner

Measurement Science and Technology

Volumn 11, Issue 2, 2000, Pages

  Gao, Peng ^a   Tan, Hong ^a   Yuan, Zhejun ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Flexure hinge; Laser interferometer; Piezoelectric actuator; Stepping positioner

Indexed keywords

INTERFEROMETERS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; POSITION CONTROL;

PIEZOELECTRIC ACTUATOR; STEPPING POSITIONER;

ACTUATORS;

EID: 0033726096     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/2/401     Document Type: Article

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