Fabrication and characterization of a PZT thin film actuator for a micro electromechanical switch application

Materials Research Society Symposium - Proceedings

Volumn 688, Issue , 2002, Pages 145-152

  Hoffmann, Marcus ^a   Leuerer, Timm ^a   Krüger, Clemens ^a   Böttger, Ulrich ^a   Mokwa, Wilfried ^a   Waser, Rainer ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; CHARACTERIZATION; COMPUTER SIMULATION; FABRICATION; FERROELECTRIC THIN FILMS; FINITE ELEMENT METHOD; INTERFEROMETRY; LASER APPLICATIONS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; SEMICONDUCTOR SWITCHES;

BENDING BEAMS; FINITE ELEMENT ANALYSIS SIMULATION; LASER INTERFEROMETRY; LEAD ZIRCONIUM TANTALATE; MICRELECTROMECHANICAL SWITCH; STRESS CONTRIBUTION; SWITCH CONTACT FOCE; THIN FILM ACTUATOR;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 0036353526     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)