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Precision Engineering

Volumn 26, Issue 4, 2002, Pages 355-369

Design and control for an electromagnetically driven X-Y-θ stage

(3) Chen, K S a Trumper, D L b Smith, S T c

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

b Massachusetts Institute of Technology Cambridge (United States)

c University of North Carolina at Charlotte (United States)

Author keywords

Feedback linearization; Flexure stage; Magnetic bearings; Mechatronics

Indexed keywords

BANDWIDTH; CAPACITANCE; DATA STORAGE EQUIPMENT; FEEDBACK CONTROL; LINEARIZATION; MACHINE DESIGN; MACHINING; MAGNETIC BEARINGS; ROTATING MACHINERY; SPRINGS (COMPONENTS); STIFFNESS; SURFACES; VIBRATIONS (MECHANICAL);

FLEXURAL STAGES;

MOTION CONTROL;

EID: 0036776511 PISSN: 01416359 EISSN: None Source Type: Journal
DOI: 10.1016/S0141-6359(02)00147-2 Document Type: Article

Times cited : (79)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.