LINEAR THERMOMECHANICAL MICROACTUATORS

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 181-188

  Cragun, Rebecca ^a   Howell, Larry L ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS; THERMAL EXPANSION;

FINITE ELEMENT ANALYSIS MODELING; HIGH OUTPUT; MICRO-DEVICE; OPERATIONAL PRINCIPLES; OUTPUT FORCE; THERMAL ACTUATOR; THERMO-MECHANICAL; VARIABLE CROSS SECTION;

FINITE ELEMENT METHOD;

EID: 85122664112     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0265     Document Type: Conference Paper

References (15)

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2. Comtois, John H., Victor M. Bright, and Mark W. Phipps, 1995, “Thermal microactuators for surface-micromachining processes,” SPIE, Vol. 2642, pp. 10-21.
3. Comtois, John H. and Victor M. Bright, 1996, “Surface micromachined polysilicon thermal actuator arrays and applications,” Solid-State Sensor and Actuator Workshop, p. 174-177.
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