Compact and precise positioner based on the Inchworm principle

Journal of Micromechanics and Microengineering

Volumn 10, Issue 4, 2000, Pages 516-521

  Cusin, Pierre ^a   Sawai, Takuhiko ^a   Konishi, Satoshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLAMPING DEVICES; COST EFFECTIVENESS; ELECTROSTATICS; MICROMACHINING; PIEZOELECTRIC TRANSDUCERS; POSITION CONTROL; SYNCHRONIZATION;

INCHWORM PRINCIPLE; PIEZOELECTRIC ACTUATION; PIEZOELECTRIC LINEAR MICROPOSITIONERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034506428     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/4/305     Document Type: Article

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