Piezoelectric piggy-back microactuator for hard disk drive

IEEE Transactions on Magnetics

Volumn 35, Issue 2 PART 1, 1999, Pages 983-987

  Soeno, Yoshikazu ^a   Ichikawa, Shinji ^a   Tsuna, Takamitsu ^a   Sato, Yoshikazu ^a   Sato, Isamu ^a  

^a TDK CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001097452     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.753820     Document Type: Article

References (8)

1. Mori, T. Munemoto, H. Otsuki, Y. Ymaguchi, and K. Akagi, "A dual-stage magnetic disk drive actuator using a piezoelectric device for a high track density," IEEE Trans. Magn., vol. 27, no. 6, pp. 5298-5300, Nov. 1991.
2. Takaishi, T. Imamura, Y. Mizoshita, S. Hasegawa, T. Ueno, and T. Yamada, "Microactuator control for disk drive," IEEE Trans. Magn., vol. 32, no. 3, pp. 1863-1866, May 1996.
3. Cheung, R. Horowitz, and R. T. Howe, "Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator," IEEE Trans.Magn., vol. 32, no. 1, pp. 122-128, Jan. 1996.
4. L.-S. Fan, H. H. Ottesen, T. C. Reiley, and R. W. Wood, "Magnetic recording-head positioning at very high track densities using a microactuator-based, two-stage servo system," IEEE Trans, Ind. Electronics, vol. 42, no. 3, pp. 222-233, June 1995.
5. A. Horsley, A. Singh, A. P. Pisano, and R. Horowitz, "Angular micropositioners for disk drives," Intl. Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, pp. 454-459, 1997.
6. Hirano, L.-S. Fan, and J. Q. Gao, "Invar MEMS milliactuator for hard disk drive applications," Intl. Workshop on Micro Electro Mechanical Systems, Nagoya, Japan, pp. 378-382, 1997.
7. Nakamura, K. Suzuki, and H. Fujita, "On a micro actuator for hard disk drives," The 74th JSME Annual meeting, vol. 4, no. 97-1, pp. 378-379, 1997.
8. Imamura, T. Koshikawa, and M. Katayama, "Transverse mode electrostatic microactuator for MEMS-based HDD slider," in IEEE Proc. MEMS Workshop, pp. 216-221, Feb. 1996.