Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator

IEEE Transactions on Magnetics

Volumn 32, Issue 1, 1996, Pages 122-128

  Cheung, Patrick ^b   Horowitz, Roberto ^a,b   Howe, Roger T ^a,b  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; SEMICONDUCTING SILICON;

ELECTROSTATICALLY DRIVEN POLYSILICON MICROACTUATOR; MICROSTRUCTURE TECHNOLOGY; MODULAR INTEGRATION;

ACTUATORS;

EID: 0029733584     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.477561     Document Type: Article

References (17)

1. Kurt. E. Peterson, " Silicon as a mechanical material", Proceedings of the IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
2. Roger T. Howe, " Recent advances in surface micromachining", in 13th Sensor Symposium, IEE of Japan, June 8-9 1995.
3. Weijie Yun, Roger T. Howe, and Paul R. Gray, " Surface micromachined, digitally force-balanced accelerometer with integrated cmos detection circuitry", in Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, S.C., June 1992, pp. 126-131.
4. James M. Bustillo, Gary K. Fedder, Clark T.-C. Nguyen, and Roger T. Howe, " Process technology for the modular integration of cmos and polysilicon microstructures", Microsystem Technologies 1, pp. 30-41, 1994.
5. Gary K. Fedder and Roger T. Howe, " Integrated test-bed for multi-mode digital control of suspended microstructures", m Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, S.C., June 1994, pp. 63-68.
6. Theresa A. Core, W. K. Tsang, and Steven J. Sherman, " Fabrication technology for an integrated surface-micromachined sensor", Solid-State Technology, pp. 39-47, Oct 1993.
7. J.Y. Yen, K. Hallamasek, and R. Horowitz, " Track following controller design for a compound disk drive actuator", ASME Journal of Dynamic Systems, Measurement and Controls, vol. 112, no. 3, pp. 391-402, Sept 1990.
8. Long-Sheng Fan, Hal H. Ottesen, Timothy C. Reiley, and Roger W. Wood, " Magnetic recording head positioning at very high track densities using a microactuator-based, two-stage servo system", IEEE Trans. on Industrial Electronics, vol. 42, no. 3, pp. 222-233, 1995.
9. Denny Miu and Yu-Cliong Tai, " Silicon micromachined scaled technology", IEEE Trans. on Industrial Electronics, vol. 42. no. 3, pp. 234-239, 1995.
10. H. Guckel, T. R. Christenson, and K.J. Skrobis, " Deep x-ray lithography, metal plating, and assembly as fabrication tools", in Proc. 11th Sensor Symposium, Tokyo, Japan, June 4-5 1992, pp. 1-6.
11. Chris Keller and R. T. Howe, " Nickel-filled hexsil thermally actuated tweezers", in 8th International Conference on Solid-State Sensor and Actuator, Stockholm, Sweden. June 1995, pp. 376-379.
12. William C. Tang, Tu-Cuong H. Nguyen, and R.T. Howe, " Laterally driven polysilicon resonant microstructures", Sensors and Actuators, vol. 20, pp. 25-32, 1989.
13. Patrick C.-P. Cheung, Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators, PhD thesis, University of California at Berkeley, 1995.
14. Gary K. Fedder, Simulation of Microelectromechanical Systems, PhD thesis, University of California at Berkeley, 1994.
15. William C. Tang, Martin G. Lim, and Roger T. Howe, " Electrostatic comb drive levitation and control method", Journal of MicroElectroMechanical Systems, vol. 1, no. 4, pp. 170-178, Dec. 1992.
16. Michael W. Judy, Micromechanisms using Sidewall Beams, PhD thesis, University of California at Berkeley, 1994.
17. Thomas Kailath, Ed., Linear Systems, Prentice-Hall, 1st edition, 1980.