An ultraprecision stage for alignment of wafers in advanced microlithography

Precision Engineering

Volumn 21, Issue 2-3, 1997, Pages 113-122

  Lee, Chang Woo ^a   Kim, Seung Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Dual servo control; Linear dc motors; Microlithography; Piezoelectric actuators; Precision xy stages; Ultraprecision positioning

Indexed keywords

ACTUATORS; ELECTRIC MOTORS; INTEGRATED CIRCUIT MANUFACTURE; PIEZOELECTRIC MATERIALS; PRECISION ENGINEERING; SERVOMECHANISMS;

DUAL SERVO CONTROL; PIEZOELECTRIC ACTUATOR; ULTRAPRECISION STAGE; WAFER ALIGNMENT;

LITHOGRAPHY;

EID: 0031220840     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(97)00080-9     Document Type: Article

References (11)

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