Design of a linear piezomotor with ultra-high stiffness and nanoprecision

IEEE/ASME Transactions on Mechatronics

Volumn 5, Issue 4, 2000, Pages 441-443

  Ni, Jun ^a   Zhu, Zhenqi ^a  

^a Stevens Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; STIFFNESS;

LINEAR PIEZOMOTORS; MONOLITHIC FLEXURE FRAME; NANOPRECISION; PIEZOELECTRIC ACTUATORS; ULTRAHIGH STIFFNESS;

LINEAR MOTORS;

EID: 0034475348     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.891056     Document Type: Article

References (9)

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